Time-Dependent Airborne Organic Contaimination on Silicon Wafer Surface Stored in a Plastic Box
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概要
- 論文の詳細を見る
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2003-04-15
著者
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TAKEUCHI Takashi
Department of Pediatrics, Wakayama Medical University
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OKUYAMA KIKUO
Department of Chemical Engineering, Graduate School of Engineering, Hiroshima University
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SHIMADA Manabu
Department of Chemical Engineering, Hiroshima University
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Shimada Manabu
Department Of Chemical Engineering Hiroshima University
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SUGIMOTO Fumitoshi
Fujitsu Laboratories Ltd.
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AIHARA Masahiko
Department of Material Science & Chemical Engineering, Yokohama National University
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OKAMURA Shigeru
Fujitsu Ltd.
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HABUKA Hitoshi
Department of Chemical Engineering Science, Yokohama National University
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SHIMAZAKI Yohei
Department of Chemical Engineering Science, Yokohama National University
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