Morphology Control of Films Formed by Atmospheric-Pressure Chemical Vapor Deposition Using Tetraethylorthosilicate/Ozone System
スポンサーリンク
概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1996-08-15
著者
-
OKUYAMA KIKUO
Department of Chemical Engineering, Graduate School of Engineering, Hiroshima University
-
Satoh J
Mos Development Center Sony Nagasaki Corporation
-
Adachi M
Toyama Prefectural Univ. Toyama Jpn
-
Adachi Motoaki
Research Institute For Advanced Science And Technology Osaka Prefecture University
-
Adachi Motoaki
Research Institute For Advanced Science And Techncology University Of Osaka Prefecture
-
Okuyama Kikuo
Department Of Chemical Engineering Faculty Of Engineering Hiroshima University
-
FUJIMOTO Toshiyuki
Department of Chemical Engineering, Faculty of Engineering, Hiroshima University
-
SATO Jun-ichi
MOS Development Center, SONY Nagasaki Corporation
-
MUROYAMA Masakazu
Process Technology Department, ULSI R&D Group, SONY Corporation
-
Sato Jun-ichi
Mos Development Center Sony Nagasaki Corporation
-
Muroyama M
Sony Corp. Atsugi Jpn
-
Muroyama Masakazu
Process Technology Department Ulsi R&d Group Sony Corporation
-
Muroyama Masakazu
Process Division Semiconductor Company Sony Corporation
-
Adachi Motoaki
Research Institute For Advanced Science And Technology Universiry Of Osaka Prefecture
-
Sato J
Hitachi Cable Ltd.
-
ADACHI Masatoshi
Department of Electronics and Informatics, Faculty of Engineering, Toyama Prefectural University
-
Satoh J
Laboratory Of Animal Nutrition School Of Agriculture Ibaraki University
-
Fujimoto T
Okayama Univ. Sci. Okayama Jpn
-
Fujimoto Toshiyuki
Department Of Applied Chemistry Muroran Institute Of Technology
関連論文
- Preparation of functional nanostructured particles by spray drying
- Preparation of Submicron- and Nanometer-Sized Particles of Y_2O_3:Eu^ by Flame Spray Pyrolysis Using Ultrasonic and Two-Fluid Atomizers
- Continuous Single-Step Fabrication of Nonaggregated, Size-Controlled and Cubic Nanocrystalline Y_2O_3:Eu^ Phosphors Using Flame Spray Pyrolysis
- Fabrication and Characterization of SiO_2 Particles Generated by Spray Method for Standards Aerosol
- One-Step Synthesis for Zn_2SiO_4 : Mn Particles 0.3-1.3 μm in Size with Spherical Morphology and Non-Aggregation
- Electrical Conduction near Percolation Threshold in Polymer Composite Containing Conducting Polypyrrole-Coated Insulating Polymer Fiber
- Electrical Conduction by Percolation Process in Insulating Polymer Containing Small Amount of Conducting Polymer
- Direct Measurement of Nucleation and Growth Modes in Titania Nanoparticles Generation by a CVD Method
- Direct synthesis of highly crystalline transparent conducting oxide nanoparticles by low pressure spray pyrolysis
- Nanoparticle Synthesis by Ionizing Source Gas in Chemical Vapor Deposition
- Gas-Phase Nucleation in GaAs Thin Film Preparation by Metal Organic Chemical Vapor Deposition
- Numerical Simulations of Films Formed by Cluster/Particle Co-Deposition in Atmospheric-Pressure Chemical Vapor Deposition Process Using Organic SIlicon Vapors and Ozones Gas
- Morphology Control of Films Formed by Atmospheric-Pressure Chemical Vapor Deposition Using Tetraethylorthosilicate/Ozone System
- Film Formation by a New Chemical Vapor Deposition Process Using Ionization of Tetraethylorthosilicate
- Sintering behavior of spherical aggregated nanoparticles prepared by spraying colloidal precursor in a heated flow
- Precursors in Atmospheric-Pressure Chemical Vapor Deposition of Silica Films from Tetraethylorthosilicate/Ozone System
- Particle Generation and Film Formation in an Atmospheric-Pressure Chemical Vapor Deposition Reactor Using the Tetraethylorthosilicate (TEOS)/He, TEOS/O_2/He, and TEOS/O_3/He Systems
- Gas-Phase Nucleation in an Atmospheric Pressure Chemical Vapor Deposition Process for SiO_2 Films Using Tetraethylorthosilicate (TEOS)
- Formation of Dielectric Films for Gap-Filling by NH_3-Added H_2O-Tetraethoxysilane Plasma Chemical Vapor Deposition
- A Role of Template Surface Charge in the Preparation of Porous and Hollow Particles Using Spray-drying
- Nanosized Polymer Particle-facilitated Preparation of Mesoporous Silica Particles Using a Spray Method
- Photoluminescence Properties of Ce_Tb_xMgAl_O_ Phosphor Particles Prepared by Spray Pyrolysis
- The Influence of the Synthetic Conditions of Chemical Vapor Synthesis on the Size of Gallium Nitride Nanoparticles
- Observation of Heat-Induced Particle Resuspension and Transport in a Plasma Chemical Vapor Deposition Chamber
- Principle of Photoconductive Ferroelectric Memory Preliminary Experiments
- Preparation and Electrical Properties of Rhombohedral Pb(Zr_xTi_)O_3 Thin Films by RF Magnetron Sputtering Method
- Preparation and Electrical Properties of Sol-Gel Derived Zr-rich Pb(Zr,Ti) O_3 Thin Films
- Effects of Mobility Changes and Distribution of Bipolar Ions on Aerosol Nanoparticle Diffusion Charging
- Development of an LDMA-FCE System for the Measurement of Submicron Aerosol Particles
- One-step Preparation of BaTiO_3 Nanoparticles by Liquid Source Chemical Vapor Deposition
- Templated Synthesis of Silica Hollow Particles by Using Spray Pyrolysis
- Characterization of silica-coated Ag nanoparticles synthesized using a water-soluble nanoparticle micelle
- Synthesis of nanocrystalline GaN from Ga_2O_3 nanoparticles derived from salt-assisted spray pyrolysis
- Direct Observation of ^O Tracer Diffusion in a YBa_2Cu_3O_y Single Crystal by Secondary Ion Mass Spectrometry
- Growth of K_3Li_Nb_O_ Single-Crystal Fibers
- Influence of Synthesis Conditions on the Characteristics of Nanoparticles Produced in a Nonequilibrium Plasma Field
- Formation of Submicron Copper Sulfide Particles Using Spray Pyrolysis Method
- Measurement of Cluster Ions and Residue Nanoparticles from Water Samples with an Electrospray/Differential Mobility Analyzer
- Preparation and Properties of Niobium-Doped Pb[(Sc_Nb_)_Ti_]O_3 Ceramics Using Hot Isostatic Pressing
- Effect of X-ray energy and ionization time on the charging performance and nanoparticle formation of a soft X-ray photoionization charger
- Alignment Technique for Thin-Film-Transistor Liquid-Crystal Displays : Liquid Crystal Display
- Alignment Technique for Thin-Film-Transistor Liquid-Crystal Displays
- Numerical Evaluation of Silicon-Thin Film Growth from SiHCl_3-H_2 Gas Mixture in a Horizontal Chemical Vapor Deposition Reactor
- Time-Dependent Airborne Organic Contaimination on Silicon Wafer Surface Stored in a Plastic Box
- Preparation of Bi-Pb-Ca-Sr-Cu-O Superconducting Thick Films Using Spray-Pyrolyzed Fine Powders
- Direct Preparation of Fine Powders of the 80 K Superconducting Phase in the Bi-Ca-Sr-Cu-O System by Spray Pyrolysis
- Direct Preparation of Uniformly-Distributed YBa_2Cu_3O_ Powders by Spray-Pyrolysis : Electrical Properties of Condensed Matter
- Photoluminescent ZrO2:Eu3+ Nanofibers Prepared via Electrospinning
- Ultra Thin Film Growth of Pd by Radical Enhanced Vapor Deposition
- SIZE CHANGE OF VERY FINE SILVER AGGLOMERATES BY SINTERING IN A HEATED FLOW
- Wall Deposition of Ultrafine Aerosol Particles by Thermophoresis in Nonisothermal Laminar Pipe Flow of Different Carrier Gas
- Preparation of microencapsulated powders by an aerosol spray method and their optical properties
- Domain Structures in K_3Li_Nb_O_ Single-Crystal Fibers Produced by the Laser-Heated Pedestal Growth Technique
- Diameter Control of K_3Li_Nb_O_ Single-Crystal Fibers
- Low-Temperature Mixed Sintering of Pb(Zr_Ti_x)O_3-Pb(Zn_Nb_)O_3 Ceramics and Their Pyroelectric Properties
- Low-Temperature Sintering of Pb(Mg_Nb_)O_3-PbTiO_3 Ceramics with Addition of PbO-Bi_2O_3
- Heating Profile Effect on Morphology, Crystallinity, and Photoluminescent Properties of Y2O3:Eu3+ Phosphor Nanofibers Prepared Using an Electrospinning Method
- Plasma Synthesis of Light Emitting Gallium Nitride Nanoparticles Using a Novel Microwave-Resonant Cavity
- Preparation of PbZrO_3 -PbTiO_3 -Pb(Mg_Nb_)O_3 Thick Films by Screen Printing
- Preparation and Properties of Pb(Sc_Nb_)O_3 Pb_La_Ti_O_3(PSN-PLT) Solid-Solution Ceramics
- SIMULATION OF A TRANSIENT HETEROGENEOUS PHASE TRANSITION
- DETERMINING THE PHASE TRANSITION OF CONDENSATE FORMED BY HETEROGENEOUS NUCLEATION OF CONDENSABLE VAPORS ONTO A COLD SUBSTRATE
- A THEORETICAL EVALUATION OF LIQUID CONDENSATE FORMATION BY HETEROGENEOUS NUCLEATION FROM A BENZENE AND CYCLOHEXANE VAPOR MIXTURE
- HETEROGENEOUS NUCLEATION CHARACTERISTICS OF MIXED VAPOR OF BENZENE AND CYCLOHEXANE ON A COLD SUBSTRATE
- OBSERVATIONS OF HETEROGENEOUS NUCLEATION OF WATER VAPOR ON A COLD SUBSTRATE
- DETERMINATION OF THE CRITICAL SUPERSATURATION RATIO IN HETEROGENEOUS NUCLEATION OF BENZENE VAPOR ON A COLD SUBSTRATE
- Preparation of 0.92PbZrO_3-0.03PbTiO_3-0.05Pb(Zn_Nb_)O_3 Pyroelectric Thick Films by Screen Printing
- Formation of Fine Particles of Zinc Sulfide from Thiourea Complexes by Spray Pyrolysis
- Biopolar Charging of Aerosol Nanoparticles by a Soft X-ray Photoionizer
- Generation of nanodroplets and nanoparticles by ion-induced nucleation
- Molecular Flow Analysis in Orifice-Restricted Tube Using Maxwellian Distribution Function
- Preparation and Properties of Pb[(Sc_Nb_)_Ti_]O_3 Ceramics ( FERROELECTRIC MATERIALS AND THEIR APPLICATIONS)
- Progress in developing spray-drying methods for the production of controlled morphology particles : From the nanometer to submicrometer size ranges
- Indium Tin Oxide Nanofiber Film Electrode for High Performance Dye Sensitized Solar Cells
- A Free Molecular Flow Characteristic through a Conduit with an Orifice-Restricted Exit
- Flame Spray Pyrolysis for Preparing Red-Light-Emitting, Submicron-Sized Luminescent Strontium Titanate Particles
- TURBULENT COAGULATION OF AEROSOLS IN A STIRRED TANK
- CHANGE IN PARTICLE SIZE DISTRIBUTIONS OF POLYDISPERSE AEROSOLS UNDERGOING BROWNIAN COAGULATION
- Simultaneous Observation of Molecular Contamination Behavior in Semiconductor Clean room Using Quartz Crystal Microbalance
- Photoluminescence Characteristics of Macroporous Eu-Doped Yttrium Oxide Particles Prepared by Spray Pyrolysis
- Decolorization of beads-milled TiO_2 nanoparticles suspension in an organic solvent
- Influence of Polymer Decomposition Temperature on the Formation of Rare-Earth Free Boron Carbon Oxynitride Phosphors
- Time-Dependent Airborne Organic Contamination on Silicon Wafer Surface Stored in a Plastic Box
- Observation of Adsorption Phenomena of Dibutyl Phthalate Molecules on Si Surface Using Quartz Crystal Microbalance Method
- Adsorption and Desorption of Dibutyl Phthalate on Si Surface Measured in Controlled Atmosphere using Quartz Crystal Microbalance Method
- Molecular Flow Analysis in Orifice-Containing Tube Using Maxwellian Distribution Function.
- Photoluminescence Properties of Submicrometer Phosphors with Different Crystallite/Particle Sizes
- Development of a method for testing very high-efficiency membrane filters for ultrafine aerosol particles.
- Measurement of electric charge of aerosol particles generated by various methods.
- The effect of neighbouring fibers on the single fiber inertia-interception efficiency of aerosols.
- EXPERIMENTAL STUDY OF THERMOPHORESIS OF AEROSOL PARTICLES
- Effects of brownian coagulation and brownian diffusion on fine particle size analysis by sedimentation method.
- Dispersion mechanism of aggregate particles in air.
- Effect of Brownian diffusion on electrical classification of ultrafine aerosol particles in differential mobility analyzer.
- Application of particle enlargement by condensation to industrial dust collection.
- PREDICTION OF COLLECTION EFFICIENCY OF AEROSOLS BY HIGH-POROSITY FIBROUS FILTER
- Re-entrainment of small aggregate particles from a plane surface by air stream.
- Response of cigarette smoke particles to change in humidity.
- EFFECT OF BROWNIAN COAGULATION AND BROWNIAN DIFFUSION ON GRAVITATIONAL SETTLING OF POLYDISPERSE AEROSOLS
- Nanoparticle Synthesis by Ionizing Source Gas in Chemical Vapor Deposition