Plasma Synthesis of Light Emitting Gallium Nitride Nanoparticles Using a Novel Microwave-Resonant Cavity
スポンサーリンク
概要
- 論文の詳細を見る
Gallium nitride (GaN) based light-emitting nanoparticles were synthesized by microwave plasma chemical vapor synthesis under slightly reduced pressure condition. A novel 2.45 GHz microwave resonant cavity was developed that facilitated the ignition and stable operation. The cavity was designed with the aid of electromagnetic field simulations to match the microwaves in the transverse magnetic (TM) 010-like mode before plasma ignition and in a transverse electromagnetic (TEM)-like mode after plasma ignition. The produced nanoparticles were amorphous and emitted light at the same wavelength as bulk gallium nitride.
- 2006-01-15
著者
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Shimada Manabu
Department Of Chemical Engineering Faculty Of Engineering Hiroshima University
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Okuyama Kikuo
Department Of Chemical Engineering Faculty Of Engineering Hiroshima University
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TANABE Eiji
AET JAPAN, INC.
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Hayashi Yutaka
Department Of Cardiology Uwajima Social Insurance Hospital
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Azuma Yasushi
Department of Chemical Engineering, Graduate School of Engineering, Hiroshima University, 1-4-1 Kagamiyama, Higashi-Hiroshima, Hiroshima 739-8527, Japan
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Hayashi Yutaka
Department of Chemical Engineering, Graduate School of Engineering, Hiroshima University, 1-4-1 Kagamiyama, Higashi-Hiroshima, Hiroshima 739-8527, Japan
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Tanabe Eiji
AET Japan, Inc., URSIS Bldg. 8, 9th Floor, 1-2-3 Manpukuji, Asao-ku, Kawasaki 215-0004, Japan
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Okuyama Kikuo
Department of Chemical Engineering, Graduate School of Engineering, Hiroshima University, 1-4-1 Kagamiyama, Higashi-Hiroshima, Hiroshima 739-8527, Japan
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Shimada Manabu
Department of Chemical Engineering, Graduate School of Engineering, Hiroshima University, 1-4-1 Kagamiyama, Higashi-Hiroshima, Hiroshima 739-8527, Japan
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