Adsorption and Desorption of Dibutyl Phthalate on Si Surface Measured in Controlled Atmosphere using Quartz Crystal Microbalance Method
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概要
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The adsorption of dibutyl phthalate (DBP) molecules on the surface of Si was studied using a highly sensitive quartz crystal microbalance (QCM) and new sliding chamber system, and using the accurate decomposition analysis of the decay curve method. It has been understood that the DBP molecules are adsorbed on the Si surface at three different kinds of adsorption sites that require different desorption energies; two of the three are in equilibrium with the DBP molecular density in the vapor phase, one being a site that has a 400 s desorption time constant at 23°C which seems to be the isolated admolecules, and the other site has a 1900 s desorption time constant which seems to be the cohesion of the admolecules. The third site is a site that has an 18000 s desorption time constant that seems to be restricted by something on the surface, such as an atomic terrace edge or crystal defect.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2004-05-15
著者
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Shimada Manabu
Department Of Chemical Engineering Faculty Of Engineering Hiroshima University
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Okuyama Kikuo
Department Of Chemical Engineering Faculty Of Engineering Hiroshima University
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Okamura Shigeru
Fujitsu Laboratories Limited
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Shimada Manabu
Department of Chemical Engineering, Hiroshima University, Kagamiyama, Higashi-Hiroshima, Hiroshima 739-8527, Japan
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