Satoh J | Mos Development Center Sony Nagasaki Corporation
スポンサーリンク
概要
関連著者
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Satoh J
Mos Development Center Sony Nagasaki Corporation
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SATO Jun-ichi
MOS Development Center, SONY Nagasaki Corporation
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Muroyama M
Sony Corp. Atsugi Jpn
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Muroyama Masakazu
Process Technology Department Ulsi R&d Group Sony Corporation
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Sato J
Hitachi Cable Ltd.
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Satoh J
Laboratory Of Animal Nutrition School Of Agriculture Ibaraki University
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OKUYAMA KIKUO
Department of Chemical Engineering, Graduate School of Engineering, Hiroshima University
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Adachi M
Toyama Prefectural Univ. Toyama Jpn
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Adachi Motoaki
Research Institute For Advanced Science And Technology Osaka Prefecture University
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Adachi Motoaki
Research Institute For Advanced Science And Techncology University Of Osaka Prefecture
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Okuyama Kikuo
Department Of Chemical Engineering Faculty Of Engineering Hiroshima University
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MUROYAMA Masakazu
Process Technology Department, ULSI R&D Group, SONY Corporation
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Muroyama Masakazu
Process Division Semiconductor Company Sony Corporation
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Adachi Motoaki
Research Institute For Advanced Science And Technology Universiry Of Osaka Prefecture
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ADACHI Masatoshi
Department of Electronics and Informatics, Faculty of Engineering, Toyama Prefectural University
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峠 登
近畿大学理工学部金属工学科
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峠 登
近畿大学
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SHIMADA Manabu
Department of Chemical Engineering, Hiroshima University
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Shimada M
Ntt Microsystem Integration Lab. Kanagawa Jpn
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Shimada M
Hiroshima Univ. Higashi‐hiroshima
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Shimada Manabu
Department Of Chemical Engineering Faculty Of Engineering Hiroshima University
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TOHGE Noboru
Department of Applied Chemistry, College of Engineering, University of Osaka Prefecture
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Shimada M
Graduate School Of Natural Science And Technology Kanazawa University
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Tohge Noboru
Department Of Applied Chemistry College Of Engineering University Of Osaka Prefecture
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SATO Jun-ichi
Process Technology Department, ULSI R & D Group, SONY Corporation
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FUJIMOTO Toshiyuki
Department of Chemical Engineering, Faculty of Engineering, Hiroshima University
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Sato Jun-ichi
Mos Development Center Sony Nagasaki Corporation
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Muroyama Masakazu
Ulsi R & D Laboratories Sony Corporarion Atsugi Technology Center
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SATO Jun-ichi
ULSI R & D Laboratories, SONY Corporarion, Atsugi Technology Center
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SATOH Jun-ichi
Process Technology Department, ULSI R&D Group, SONY Corporation
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KAWASHIMA Atsushi
ULSI R & D Laboratories, Sony Corporation
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Kawashima Atsushi
Ulsi R & D Laboratories Sony Corporation
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Fujimoto T
Okayama Univ. Sci. Okayama Jpn
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Fujimoto Toshiyuki
Department Of Applied Chemistry Muroran Institute Of Technology
著作論文
- Morphology Control of Films Formed by Atmospheric-Pressure Chemical Vapor Deposition Using Tetraethylorthosilicate/Ozone System
- Precursors in Atmospheric-Pressure Chemical Vapor Deposition of Silica Films from Tetraethylorthosilicate/Ozone System
- Particle Generation and Film Formation in an Atmospheric-Pressure Chemical Vapor Deposition Reactor Using the Tetraethylorthosilicate (TEOS)/He, TEOS/O_2/He, and TEOS/O_3/He Systems
- Gas-Phase Nucleation in an Atmospheric Pressure Chemical Vapor Deposition Process for SiO_2 Films Using Tetraethylorthosilicate (TEOS)
- Formation of Dielectric Films for Gap-Filling by NH_3-Added H_2O-Tetraethoxysilane Plasma Chemical Vapor Deposition