Optimization of SrTiO3 Precursor Films on MgO Substrates Prepared by the Metal–Organic Decomposition Method
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概要
- 論文の詳細を見る
The narrow window for the preparation conditions of SrTiO3 (STO) thin films used as a buffer layer for high-$T_{\text{c}}$ superconducting films synthesized by the metal–organic decomposition (MOD) method is reported. The values of the full width at half maximum (FWHM) of STO 200 observed from the rocking curve in X-ray diffraction (XRD) analysis are markedly suppressed up to 1.8° in the optimum range of precursor temperature. The minimum value of the in-plane FWHM of STO 110 was 2.65°. Below the optimum precursor temperature range, it was found that STO precursor films contained carbonates as a residue of metal–organic materials by X-ray photoelectron spectroscopy (XPS). A random nucleation was observed in the STO precursor films by atomic force microscopy (AFM) above the optimum range of precursor temperature.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2007-12-15
著者
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Watanabe Shoji
Department Of Applied Chemistry Faculty Of Engineering Chiba University
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Tachiki Takashi
Department Of Bioscience & Technology Faculty Of Science & Engineering Ritsumeikan Universit
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Uchiyama Tetsuji
Department Of Physics Tokyo Institute Of Technology
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Uchida Takashi
Department of Electrical and Electronic Engineering, National Defense Academy
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Uchiyama Tetsuji
Department of Physics, Miyagi University of Education, 149 Aramaki-aza-Aoba, Aoba-ku, Sendai 980-0845, Japan
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Uchida Takashi
Department of Clinical Pharmaceutical Sciences, School of Pharmaceutical Sciences, Kumamoto University
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