Fabrication and Evaluation of Thin-Film Spiral-Antenna-Coupled VO
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概要
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A VO<inf>x</inf>microbolometer coupled with thin-film spiral antenna was fabricated on a fused-quartz substrate by metal--organic decomposition (MOD). The size of the bolometer was 1 \times 52 μm<sup>2</sup>, and the antenna was designed for operating at 75--110 GHz. The DC sensitivity and responsivity of the bolometer were 540 W<sup>-1</sup>and 124 V/W at the bias current of 0.5 mA under the irradiation of a 94 GHz electromagnetic wave, respectively. These values were over one order higher than those of the Bi microbolometer, which is conventionally utilized as a detector in terahertz and infrared regions. The antenna-coupled VO<inf>x</inf>microbolometer with a high responsivity was realized by MOD.
- 2013-04-25
著者
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Tachiki Takashi
Department Of Bioscience & Technology Faculty Of Science & Engineering Ritsumeikan Universit
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Son Le
Department Of Electrical And Electronic Engineering National Defense Academy
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Uchida Takashi
Department of Electrical and Electronic Engineering, National Defense Academy, Yokosuka, Kanagawa 239-8686, Japan
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Uchida Takashi
Department of Clinical Pharmaceutical Sciences, School of Pharmaceutical Sciences, Kumamoto University
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