Fabrication of Vanadium Oxide Thin Films on Fused Quartz Substrates by Metal--Organic Decomposition for Bolometer Detectors
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概要
- 論文の詳細を見る
Axis-oriented V2O5 thin films were prepared on fused quartz substrates by metal--organic decomposition (MOD). Then these films were reduced to VOx thin films by heat treatment at a temperature of 530 °C and a pressure of 1.2 Pa in O2. The obtained VOx thin films exhibited an abrupt phase transition with a resistivity change of up to 4 orders of magnitude. These VOx films had a high temperature coefficient of resistance (TCR) of up to 4.8%/K at 300 K and these values were over two times higher than those of the films fabricated on SiO2/Si substrates.
- 2012-08-25
著者
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Tachiki Takashi
Department Of Bioscience & Technology Faculty Of Science & Engineering Ritsumeikan Universit
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Son Le
Department Of Electrical And Electronic Engineering National Defense Academy
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Son Le
Department of Electrical and Electronic Engineering, National Defense Academy, Yokosuka, Kanagawa 239-8686, Japan
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Uchida Takashi
Department of Electrical and Electronic Engineering, National Defense Academy, Yokosuka, Kanagawa 239-8686, Japan
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Uchida Takashi
Department of Clinical Pharmaceutical Sciences, School of Pharmaceutical Sciences, Kumamoto University
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