Characteristics of Vanadium Oxide Thin Films Prepared by Metal--Organic Decomposition for Bolometer Detectors
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概要
- 論文の詳細を見る
Highly axis-oriented V2O5 thin films were fabricated by metal--organic decomposition (MOD) on SiO2/Si substrates. V2O5 thin films were reduced to VOx thin films by heat treatment with a temperature of 530--580 °C, pressure of 1.2--3 Pa in O2 and heating time of 2--5 h. The VOx thin films exhibited an abrupt transition, with a resistivity change of up to 3 orders of magnitude at a transition temperature of about 55 °C. The hysteresis loop width in the transition was about 3 °C. The grain size of the VOx thin films with an abrupt transition was 200--300 nm. Furthermore, these films had a temperature coefficient of resistivity (TCR) of up to 2.2%/K at 300 K.
- 2011-02-25
著者
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Tachiki Takashi
Department Of Bioscience & Technology Faculty Of Science & Engineering Ritsumeikan Universit
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Uchida Takashi
Department of Clinical Pharmaceutical Sciences, School of Pharmaceutical Sciences, Kumamoto University
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Le Ngoc
Department of Electrical and Electronic Engineering, National Defense Academy, Yokosuka, Kanagawa 239-8686, Japan
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