Columnar Grain Structure in Cobalt Films Evaporated Obliquely at Low Substrate Temperatures

概要

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We investigated the columnar grain structure in cobalt films evaporated obliquely at a low substrate temperature. The substrate temperature $T_{\text{S}}$ was varied from 113 to 313 K. The incidence angle was 60°, and the pressure during evaporation was $4.0 \times 10^{-3}$ Pa. In the $T_{\text{S}}$ range of 230–270 K, the tops of the columnar grains exhibited the {0001} crystal habit and their bundling was formed, but at a $T_{\text{S}}$ below 220 K, the crystal habit disappeared and the bundling diminished. Furthermore, at a high pressure of 0.02 Pa obtained by closing the main valve halfway during evaporation, the bundling was also formed at a $T_{\text{S}}$ below 220 K, which indicates the exhibition of crystal habit. These results support our assertion that there exists a crystallographic contribution to the bundle formation through the crystal habit. The analysis of residual gas suggests that the disappearance and reappearance of the crystal habit at a $T_{\text{S}}$ below 220 K are due to contamination by H2O and N2 molecules, respectively.
Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
2006-04-15