Development of High-Angular-Resolution Microdiffraction System for Reciprocal Space Map Measurements
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概要
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We have developed a new high-angular-resolution X-ray microdiffraction system for reciprocal space map (RSM) measurements on the BL13XU beam line at the SPring-8. This system uses a focused beam produced by using a zone plate combined with a narrow slit. This arrangement produces a focused beam having both a small beam size and a small angular divergence. The beam size and angular divergence are measured to be $0.5\times 1.6$ μm2 and 100 μrad, respectively. We demonstrate that RSMs measured with this system characterize the strain status of strain-relaxed SiGe buffer layers well.
- Japan Society of Applied Physicsの論文
- 2006-10-25
著者
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TAKEDA Shingo
Japan Synchrotron Radiation Research Institute
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SAKATA Osami
Japan Synchrotron Radiation Research Institute
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Kimura Shigeru
Japan Symchrotron Radiation Research Institute
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Sakai Akira
Department Of Agricultural Chemistry The University Of Tokyo
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Sakata Osami
Japan Synchrotron Radiation Research Institute, Kouto, Sayo-cho, Sayo-gun, Hyogo 679-5198, Japan
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Takeda Shingo
Japan Synchrotron Radiation Research Institute, Kouto, Sayo-cho, Sayo-gun, Hyogo 679-5198, Japan
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