Focused Ion Beam Patterning for Fabrication of Periodical Two-Dimensional Zinc Oxide Nanodot Arrays
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概要
- 論文の詳細を見る
Widely well-aligned two-dimensional ZnO nanodot arrays (e.g., 40,000 nanodots of 130 nm diameter and 9 nm height over $150 \times 150$ μm2 with a period of 750 nm) have been fabricated by metalorganic chemical vapor deposition on SiO2/Si substrates patterned by focused ion beam (FIB). A low-magnification FIB patterning mode allowed the periodical nanopatterning of the substrates over a large area in a short time. Cathodoluminescence and photoluminescence were apparently observed from the ZnO nanodots.
- Japan Society of Applied Physicsの論文
- 2004-05-15
著者
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Fujita Shizuo
International Innovation Center Kyoto University
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Fujita Shigeo
Department Of Applied Physics And Physico-informatics Keio University
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Kim Sang-woo
Department Of Electronic Science And Engineering Kyoto University
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Ueda Masaya
Department Of Electronic Science And Engineering Kyoto University
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Kim Sang-Woo
Department of Electronic Science and Engineering, Kyoto University, Kyodai-Katsura, Nishikyo-ku, Kyoto 615-8510, Japan
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Fujita Shigeo
Department of Electronic Science and Engineering, Kyoto University, Kyodai-Katsura, Nishikyo-ku, Kyoto 615-8510, Japan
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Ueda Masaya
Department of Electronic Science and Engineering, Kyoto University, Kyodai-Katsura, Nishikyo-ku, Kyoto 615-8510, Japan
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Fujita Shizuo
International Innovation Center, Kyoto University, Yoshida-Hommachi, Sakyo-ku, Kyoto 606-8501, Japan
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Kim Sang-Woo
Department of Architectural Engineering, Kongju National University
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