Self-Tailored One-Dimensional ZnO Nanodot Arrays Formed by Metalorganic Chemical Vapor Deposition
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概要
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One-dimensional ZnO nanodot arrays have been realized by metalorganic chemical vapor deposition on SiO2 substrates patterned by focused ion beam (FIB). Especially for the lines with the depth of 5 nm and the length of 0.7, 1.3 or 1.7 μm, one, two or three nanodots, respectively, of fairly uniform size 6-nm height and 80-nm width are symmetrically accommodated in a line. These phenomena are translated as "self-tailoring" of ZnO nanodots, i.e., where the nanodots will be is predetermined before the growth and is arbitrarily controlled by the nanopatterns. This can be a promising technique to build nanostructure blocks for nanoscale device applications.
- Publication Office, Japanese Journal of Applied Physics, Faculty of Science, University of Tokyoの論文
- 2003-06-01
著者
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Fujita Shizuo
International Innovation Center Kyoto University
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Fujita Shigeo
Department Of Applied Physics And Physico-informatics Keio University
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KOTANI Teruhisa
Department of Electronic Science and Engineering, Kyoto University
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Kim Sang-woo
Department Of Electronic Science And Engineering Kyoto University
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Ueda Masaya
Department Of Electronic Science And Engineering Kyoto University
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Kim Sang-Woo
Department of Electronic Science and Engineering, Kyoto University, Sakyo-ku, Kyoto 606-8501, Japan
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Fujita Shigeo
Department of Electronic Science and Engineering, Kyoto University, Sakyo-ku, Kyoto 606-8501, Japan
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Kotani Teruhisa
Department of Electronic Science and Engineering, Kyoto University, Sakyo-ku, Kyoto 606-8501, Japan
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Ueda Masaya
Department of Electronic Science and Engineering, Kyoto University, Sakyo-ku, Kyoto 606-8501, Japan
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