Growth of Crystalline Zinc Oxide Thin Films by Fine-Channel-Mist Chemical Vapor Deposition
スポンサーリンク
概要
- 論文の詳細を見る
A simple, cost-effective, and safe growth technique, that is, mist chemical vapor deposition method, has been applied to the growth of single crystalline ZnO thin films on $a$-plane sapphire substrates. A water solution of zinc acetic acid and compressed air were used as sources, and the growth was performed at 800 °C. Under optimized conditions, the X-ray diffraction rocking curve's full-width at half maximum was 224 arcsec, rotational domains were hardly observed, and the photoluminescence spectra showed predominant near-band-edge emission without noticeable deep-level emissions. The potential of the technique for the growth of single-crystalline ZnO thin films was apparently shown, and efforts to improve source purity, which affects the optical and electrical properties of the films, as well as to further optimize the growth conditions will contribute to the fabrication of multifunctional ZnO-based thin films towards wide application fields without a heavy load to the environment.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2008-06-25
著者
-
Fujita Shizuo
International Innovation Center Kyoto University
-
Kawaharamura Toshiyuki
Department of Electronic Science and Engineering, Kyoto University, Katsura, Nishikyo-ku, Kyoto 615-8510, Japan
-
Nishinaka Hiroyuki
Department of Electronic Science and Engineering, Kyoto University, Katsura, Nishikyo-ku, Kyoto 615-8510, Japan
-
Nishinaka Hiroyuki
Department of Electronic Science and Engineering, Kyoto University, 1 Kyodai-Katsura, Nishikyo-ku, Kyoto 615-8510, Japan
関連論文
- Focused Ion Beam Patterning for Fabrication of Periodical Two-Dimensional Zinc Oxide Nanodot Arrays
- Self-Tailored One-Dimensional ZnO Nanodot Arrays Formed by Metalorganic Chemical Vapor Deposition
- Growth of ZnO Nanorods on A-Plane (1120) Sapphire by Metal- Organic Vapor Phase Epitaxy
- Self-Assembled Three-Dimensional ZnO Nanosize Islands on Si Substrates with SiO_2 Intermediate Layer by Metalorganic Chemical Vapor Deposition : Semiconductors
- Effect of Rapid Thermal Annealing on Al Doped n-ZnO Films Grown by RF-Magnetron Sputtering
- Blue Photoluminescence from ZnCdO Films Grown by Molecular Beam Epitaxy
- Growth of ZnO by Molecular Beam Epitaxy Using NO_2 as Oxygen Source
- MBE Growth of ZnO Using NO_2 as Oxygen Source
- Quantum Chemical Study on Interactions of Diethylzinc with Nitrous Oxide and Water for ZnO Growth by Metal–Organic Vapor Phase Epitaxy
- Self-Tailored One-Dimensional ZnO Nanodot Arrays Formed by Metalorganic Chemical Vapor Deposition
- Focused Ion Beam Patterning for Fabrication of Periodical Two-Dimensional Zinc Oxide Nanodot Arrays
- Growth of Crystalline Zinc Oxide Thin Films by Fine-Channel-Mist Chemical Vapor Deposition
- Linear-Source Ultrasonic Spray Chemical Vapor Deposition Method for Fabrication of ZnMgO Films and Ultraviolet Photodetectors
- Low-Temperature Growth of ZnO Thin Films by Linear Source Ultrasonic Spray Chemical Vapor Deposition
- Epitaxial ZnO Thin Films on $a$-Plane Sapphire Substrates Grown by Ultrasonic Spray-Assisted Mist Chemical Vapor Deposition
- Erratum: "Linear Source Ultrasonic Spray Chemical Vapor Deposition Method for Fabrication of ZnMgO Films and Ultraviolet Photodetectors"
- (111)-Oriented Zn3N2 Growth on $a$-Plane Sapphire Substrates by Molecular Beam Epitaxy
- Density Functional Theory Study on $\beta$-Hydride Elimination as Thermal Decomposition Process of Diethylzinc
- Growth Behavior of Nonpolar ZnO on $M$-plane and $R$-plane Sapphire by Metalorganic Vapor Phase Epitaxy
- Ga2O3 Thin Film Growth on $c$-Plane Sapphire Substrates by Molecular Beam Epitaxy for Deep-Ultraviolet Photodetectors
- Molecular Beam Epitaxy of High Magnesium Content Single-Phase Wurzite MgxZn1-xO Alloys ($x\simeq 0.5$) and Their Application to Solar-Blind Region Photodetectors