Formation of Very Thin Epitaxial Al_2O_3 Pre-Layer with Very Smooth Surface on Si(111) Using Protective Oxide Layer
スポンサーリンク
概要
- 論文の詳細を見る
- 1998-09-07
著者
-
Miura Hiroyuki
Department Of Natural History Sciences Faculty Of Science Hokkaido University
-
Jung Young-chul
Department Of Electrical And Electronic Engineering Toyohashi University Of Technology
-
Ishida Makoto
Department Of Applied Chemistry & Biochemistry Faculty Of Engineering Kumamoto University
-
Miura H
Fixed Prosthodontics Department Of Restorative Sciences Graduate School Tokyo Medical And Dental Uni
-
Miura Hiroyuki
Department Of Civil Engineering
関連論文
- Crystal structure of parasibirskite (CaHBO_3) and polymorphism in sibirskite and parasibirskite
- Momoiite, (Mn^, Ca)_3(V^, Al)_2Si_3O_, a new manganese vanadium garnet from Japan
- Epidote-(Sr), CaSrAl_2Fe^(Si_2O_7)(SiO_4)(OH), a new mineral from the Ananai mine, Kochi Prefecture, Japan
- Low-Noise Fully Differential Amplifiers Using JFET-CMOS Integration Technology for Smart Sensors
- Neo-Transmitter Using Pulse Width Modulation (PWM) Method for Wireless Smart Sensors
- Traumatic mesenteric bleeding managed solely with transcatheter embolization
- Field Electron Emission from Silicon Nanoprotrusions : Surfaces, Interfaces, and Films
- Improvement of Metal-Oxide Semiconductor Interface Characteristics in Complementary Metal-Oxide Semiconductor on Si(111) by Combination of Fluorine Implantation and Long-Time Hydrogen Annealing
- Fabrication of JFET device on Si (111) for sensor interface array circuit
- Signal Conditioning CMOS Circuits Integrated on Si (111) for Image-Recording Sensor of Neural Activity
- Recurrent Squamous Cell Carcinoma of the Breast with Undifferentiated Features : Report of a Case
- Crystal structure of sibirskite (CaHBO_3) by Monte Carlo simulation and Rietveld refinement
- Increased Signal Intensity in the Normal Glenoid Labrum in MR Imaging : Diagnostic Pitfalls Caused by the Magic-angle Effect
- Development of Radio Frequency Transmitters Including On-chip Antenna for Intelligent Human Sensing Systems
- JTII-29 Proteomic analysis of stage I primary lung adenocarcinoma aimed at individualization of postoperative therapy
- Prognostic Factors and Proliferative Activities in Breast Cancer. A Comparative Study between Recurrent and Non-Recurrent Cases of Human Breast Carcinomas
- Microtensile Bond Strength of Dual-cure Resin Cement to Root Canal Dentin with Different Curing Strategies
- In vitro ^1H-NMR Spectroscopic Analysis of Metabolites in Fast-and Slow-twitch Muscles of Young Rats
- Excess Noise Characteristics of Hydrogenated Amorphous Silicon p-i-n Photodiode Films
- Excess Noise Characteristics of a-Si:H p-i-n Photodiode Films
- Excess Noise Characteristics of Hydrogenated Amorphous Silicon Avalanche Photodiode Films Using Functionally Graded Structure
- Excess Noise Characteristics of a-Si:H Avalanche Photodiode Films Using Functionally Graded Structure
- Highly sensitive quantification of vancomycin in plasma samples using liquid chromatography-tandem mass spectrometry and oral bioavailability in rats
- Realization of n-type and p-type Si-Microprobe Array Using In-Situ Doping with Selective Vapor-Liquid-Solid (VLS) Growth Method
- Highly Syn π-Facial Preference in the Diels - Alder Reactions of 1,2,3,4,5-Pentamethylcyclopentadienes Having Carboxy, Ethoxycarbonyl, and Cyano Substituents at 5-Positions
- Characterization of SOS Films Grown with Amorphous Si Buffer Layers by MOS FET's
- Differences in Inhibition of Emergence by High Temperature between Lettuce Cultivars
- A comparison of the different bracket slots for surface roughness using a confocal optical microscope
- A comparison of titanium alloy orthodontic wires for surface roughness using a confocal optical microscope
- Prediction of Water Quality in a Harbor Improved by Means of the Coastal Water Purification System with Permeable Rubble-mound Breakwaters
- Clinical Features of Medical Pneumomediastinum
- Successful Surgical Removal of an Intrapulmonary Aberrant Needle Under Fluoroscopic Guidance : Report of a Case
- Outcome of Patients with Early Stage Lung Cancer
- Cavitating Adenocarcinoma of the Lung
- Primary Pulmonary Lymphoma Diagnosed by Gene Rearrangement : Report of a Case
- Analysis of CSO Control with Storm Water reservoir
- Olfactory Neuroblastoma Visualized by Technetium-99m-ECD SPECT
- Dissociation of brain edema induced by cold injury in rat model : MR imaging and perfusion studies with ^ C-iodo-anipyrine
- Occlusion,prothodontic treatment, and temporomandibular disorders:A Review
- Bolus injection of contrast agents with various iodine concentrations and delivery rates for intracranial three-dimensional CT angiography : evaluation of intracranial arteriovenous contrast using a multidetector-row CT scanner
- Attenuation values of the intracranial arterial and venous vessels by bolus injection of various contrast agents : a study with a single-detector helical CT scanner
- Pilomatrix carcinoma arising from pilomatricoma after 10-year senescent period : Immunohistochemical analysis
- A comparative study of frictional resistance and surface roughness between orthodontic bracket and arch wire
- Evaluation of Diabetic Nephropathy by Doppler Color Flow Imaging
- A Fused pH and Fluorescence Sensor Using the Same Sensing Area
- Compact Electrochemical System Using On-Chip Sensor Electrodes and Integrated Devices
- Charge Accumulation Type Hydrogen Ion Image Sensor with High pH Resolution
- Properties and Mechanism of Si Selective Epitaxial Growth on Al_2O_3 using Electrom Beam Irradiation
- Candida is not involved in the development of periungual psoriatic lesion
- Double SOI Structures and Device Applications with Heteroepitaxial Al_2O_3 and Si
- Multichannel 5 × 5-Site 3-Dimensional Si Microprobe Electrode Array for Neural Activity Recording System
- Effects of the π and π^* Orbitals of the 5-Unsaturated Substituents on the π-Facial Selectivities in the Diels-Alder Reactions of Cyclopentadienes
- Management of maxillary incisors with excessive root resorption due to bilateral impacted canines
- Lymphoscintigraphy for sentinel lymph node mapping in Japanese patients with malignant skin neoplasms of the lower extremities : comparison with previously investigated Japanese lymphatic anatomy
- Epitaxial Si on Al_2O_3 Films Grown with O_2 Gas by the Ultrahigh-Vacuum Chemical Vapor Deposition Method
- The Effect of Oxidation Source Gas on Epitaxial Al_2O_3 Films on Si
- Epitaxial Si on Al_2O_3 Films Grown with O_2 Gas by UHV-CVD Method
- Novel Pressure Sensors Using Epitaxially Stacked Si/Al_2O_3/Si Structures for High-Precision Thickness Control of Silicon Diaphragms
- Reductive Degradation of a[2Fe-2S] Cluster of Chlorella Ferredoxin Studied by Circular Dichroism Spectroscopy
- Formation of Very Thin Epitaxial Al_2O_3 Pre-layer with Very Smooth Surface on Si (111) Using a Protective Oxide Layer
- Formation of Very Thin Epitaxial Al_2O_3 Pre-Layer with Very Smooth Surface on Si(111) Using Protective Oxide Layer
- Fabrication of the Si/Al_2O_3/SiO_2/Si Structure Using O_2 Annealed Al_2O_3/Si Structure
- Fabrication of the Si/Al_2O_3/SiO_2/Si Structure by Using the O_2 Annealed Al_2O_3/Si Structure
- Orthodontic treatment of a patient with severe partial anodontia : A case report
- Fabrication and Electrical Characterization of Ultrathin Crystalline Al_2O_3 Gate Dielectric Films on Si(100) and Si(111) by Molecular Beam Epitaxy : Electrical Properties of Condensed Matter
- Fabrication of Resonance Tunnel Diode by γ-Al_2O_3/Si Multiple Heterostructures
- Three Dimensional Polysilicon Type Accelerometer Using Poly-Si/SiOX_n/Si/SiOX_n/Si Structure
- Crystal Structure of 3MgO・2CO_2 Solved by Monte Carlo Simulation
- Effect of Oxygen Radicals for Epitaxial Growth of Al_2O_3 on Si
- On the genus field of an algebraic number field of odd prime degree
- Study of a Wireless Multimodal Sensing System Integrated with an Electrical Conductivity Sensor and a Temperature Sensor for the Health Control of Cows
- Development of Surface Morphology of Epitaxial Al_2O_3 on Silicon by Controlling Reaction between Oxygen and Silicon Surface
- Difference of Si Selective Growth on Al_2O_3 and SiO_2 Substrates by Electron Beam Irradiation Method
- Fabrication of Si/Al2O3/Si Silicon on Insulator Structures Grown by Ultrahigh-Vacuum CVD Method
- Preparation of PLZT Thin Films by RF Sputtering
- Back-Irradiation Type Photo-Detector Arrays Using Field Emitter Deviece(Recent Progress in Photon Detection Technology)
- Fabrication of Thermoelectric Sensor Using Silicon-on-Insulator Structure
- Miniaturization of Electrical Conductivity Sensors for a Multimodal Smart Microchip
- A Wide Dynamic Range Photogate-Type Active Pixel Sensor Using a Self-Regulation Principle
- Smart Microfluidic Electrochemical DNA Sensors with Signal Processing Circuits
- Characteristics of Highly Sensitive pH Sensors with Charge Accumulation Operation
- Realization of In Situ Doped n-Type and p-Type Si-Microprobe Array by Selective Vapor-Liquid-Solid (VLS) Growth Method
- Rickets in Infancy and Childhood
- Photoelastic Analysis Comparison of Partial and Full Frameworks for Fiber Reinforced Composite FPD
- Characteristics of Metal–Oxide–Semiconductor Field-Effect Transistors with HfO2/SiO2/Si and HfO2/SiOxNy/Si Stack Structures Formed by Remote Plasma Technique
- Fabrication of Crystalline HfO2 High-$\kappa$ Dielectric Films Deposited on Crystalline $\gamma$-Al2O3 Films
- Label-Free Acetylcholine Image Sensor Based on Charge Transfer Technology for Biological Phenomenon Tracking
- Multichannel $5 \times 5$-Site 3-Dimensional Si Microprobe Electrode Array for Neural Activity Recording System
- Effect of Annealing on Physical and Electrical Properties of Ultrathin Crystalline $\gamma$-Al2O3 High-$k$ Dielectric Deposited on Si Substrates
- Progressive-Type Fused pH and Optical Image Sensor
- Development of Cavity Structure for Field Emission on Si Substrate
- Multiplication Characteristics of a-Si:H p-i-n Photodiode Film in High Electric Field
- Current–Voltage Characteristics of $\gamma$-Al2O3/epi-Si Resonant Tunneling Diodes with Different Quantum Well Thicknesses
- The Characteristic Improvement of Si (111) Metal–Oxide–Semiconductor Field-Effect Transistor by Long-Time Hydrogen Annealing
- Multiwavelength Photosensor for On-Chip Real-Time Monitoring of Fluorescence and Turbidity
- Electrical Characteristics of Epitaxial $\gamma$-Al2O3/Si for Quantum Tunneling Device
- Integrated Square Wave Voltammetry Redox Sensor System for Electrochemical Analysis
- Electron Emission Characteristic from Pb(Zr,Ti)O3 Thin Plate by Infrared Light Irradiation
- On congruence L-series:Dedicated to Professor Z. Suetuna on his 60th birthday
- On the variety of orbits with respect to an algebraic group of birational transformations