Miniaturization of Electrical Conductivity Sensors for a Multimodal Smart Microchip
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概要
- 論文の詳細を見る
A new electrical conductivity (EC) sensor with Pt electrodes on a Si substrate was proposed for use in agricultural applications. The complementary metal oxide semiconductor (CMOS) logic technology-compatible sensor was successfully fabricated with a small chip (area, 25 mm2). This sensor was used for an alternating voltage, owing to the polarization of the Pt electrode and its best operation at 10 kHz frequency. Measurements were conducted on water with electrical conductivities ranging from $10^{-2}$ to $10^{1}$ S/m, which shows sufficient linearity for use as a sensor for agriculture applications. It was also possible to be miniaturized. In an agricultural application, measurements were carried out with the sensor inserted in the rock wools, which was confirmed by the linearity of the values obtained using the sensor. In addition, successful real-time measurements using the sensor were conducted by inserting the sensor into the compost in the vicinity of the roots of a tomato seedling. This sensor provides a promising solution for an EC sensor for broad fields of agricultural applications.
- 2009-04-25
著者
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Ishida Makoto
Department Of Applied Chemistry & Biochemistry Faculty Of Engineering Kumamoto University
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Futagawa Masato
Department Of Electronic And Information Engineering Toyohashi University Of Technology
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Noda Toshihiko
Intelligent Sensing System Research Center, Toyohashi University of Technology, 1-1 Hibarigaoka, Tempaku-cho, Toyohashi, Aichi 441-8580, Japan
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Futagawa Masato
Department of Electronic and Information Engineering, Toyohashi University of Technology, 1-1 Hibarigaoka, Tempaku-cho, Toyohashi, Aichi 441-8580, Japan
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Ishida Makoto
Department of Electrical and Electronic Engineering, Toyohashi University of Technology, 1-1 Hibarigaoka, Tempaku-cho, Toyohashi, Aichi 441-8580, Japan
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Sawada Kazuaki
Department of Electric and Electronic Engineering, Toyohashi University of Technology, 1-1 Hibarigaoka, Tempaku-cho, Toyohashi, Aichi 441-8580, Japan
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Iwasaki Taichi
Department of Electrical and Electronic Engineering, Toyohashi University of Technology, Toyohashi, Aichi 441-8580, Japan
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Takao Hidekuni
Intelligent Sensing System Research Center, Toyohashi University of Technology, 1-1 Hibarigaoka, Tempaku-cho, Toyohashi, Aichi 441-8580, Japan
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Iwasaki Taichi
Department of Electrical and Electronic Engineering, Toyohashi University of Technology, 1-1 Hibarigaoka, Tempaku-cho, Toyohashi, Aichi 441-8580, Japan
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Sawada Kazuaki
Department of Electric and Electronic Engineering, Toyohashi University of Technology
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