Fabrication of JFET device on Si (111) for sensor interface array circuit
スポンサーリンク
概要
- 論文の詳細を見る
In this study, single-sided gate JFET structure on Si (111) has been proposed and investigated for array circuit. The performance of the single-sided gate JFET can be optimized by simulation, and has sufficient performance as sensor interface device. The noise level of the (111) JFET at low frequency was about 1/50 of that of a (111) n-MOSFET, and 1/25 of that of a (100) n-MOSFET. It has been experimentally confirmed that single-sided gate JFET is a suitable device as sensor interface on Si (111), possessing large interface states.
- （社）電子情報通信学会の論文
著者
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KATO YOSHIKO
Department of Bacteriology, Osaka City University Medical School
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HASHIMOTO Takashi
Department of Biochemistry, Shinshu University School of Medicine
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TAKAO Hidekuni
Department of Electrical and Electronic Engineering, Toyohashi University of Technology
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SAWADA Kazuaki
Department of Electrical and Electronic Engineering, Toyohashi University of Technology
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ISHIDA Makoto
Department of Electrical and Electronic Engineering, Toyohashi University of Technology
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Kato Yoshiko
Department Of Electrical And Electronic Engineering Toyohashi University Of Technology
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Ching Liew
Department of Electric and Electronic Engineering, Toyohashi University of Technology
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Ishida Makoto
Department Of Applied Chemistry & Biochemistry Faculty Of Engineering Kumamoto University
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Hashimoto Takashi
Department of Agrobioscience, Graduate School of Agricultural Science, Kobe University
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ISHIDA Makoto
Department of Electric and Electronic Engineering, Toyohashi University of Technology
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Takao Hidekuni
Department of Electric and Electronic Engineering, Toyohashi University of Technology, 1-1 Hibarigaoka, Tempaku-cho, Toyohashi, Aichi 441-8580, Japan
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Sawada Kazuaki
Department of Electric and Electronic Engineering, Toyohashi University of Technology
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Takao Hidekuni
Department of Electric and Electronic Engineering, Toyohashi University of Technology
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