Characteristics of Highly Sensitive pH Sensors with Charge Accumulation Operation
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概要
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A charge-transfer-type pH sensor operated by charge accumulation was demonstrated, and it was confirmed that its pH sensitivity was 1130 mV/pH with five signal integration cycles. The most familiar pH sensor using a semiconductor is the ion-sensitive field effect transistor (ISFET). The sensitivity of our pH sensor was 20 times higher than that of the ISFET. The sensitivity of the ISFET, which is similar in structure to a metal–insulator–semiconductor (MIS) structure, is restricted by the Nernst equation (59 mV/pH at room temperature). The output signal from an ISFET disappears into its noise as pH variation becomes small. The charge-transfer-type pH sensor increases the pH output signal to integrate signals in the time domain that are noise-free. It is expected that with this sensor it is possible to measure small pH signal variations.
- 2006-12-15
著者
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Ishida Makoto
Department Of Applied Chemistry & Biochemistry Faculty Of Engineering Kumamoto University
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Sawada Kazuaki
Department of Electric and Electronic Engineering, Toyohashi University of Technology, 1-1 Hibarigaoka, Tempaku-cho, Toyohashi, Aichi 441-8580, Japan
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Takao Hidekuni
Intelligent Sensing System Research Center, Toyohashi University of Technology, 1-1 Hibarigaoka, Tempaku-cho, Toyohashi, Aichi 441-8580, Japan
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Hizawa Takeshi
Department of Electrical and Electronic Engineering, Toyohashi University of Technology, 1-1 Hibarigaoka, Tempaku-cho, Toyohashi, Aichi 441-8580, Japan
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Sawada Kazuaki
Department of Electric and Electronic Engineering, Toyohashi University of Technology
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