Epitaxial Si on Al_2O_3 Films Grown with O_2 Gas by UHV-CVD Method
スポンサーリンク
概要
- 論文の詳細を見る
- 1997-09-16
著者
-
KIMURA Takayuki
Department of Electrical and Electronic Engineering, Faculty of Engineering, Niigata University
-
MORIYASU Yoshitaka
Department of Material Physics, Faculty of Engineering Science, Osaka University
-
Kimura T
Photonics Research Institute National Institute Of Advanced Industrial Science And Technology
-
Ishida Makoto
Department Of Applied Chemistry & Biochemistry Faculty Of Engineering Kumamoto University
-
Sengoku Atsuhiro
Research Center For Quantum Effect Electronics Tokyo Institute Of Technology
-
SENGOKU Atsuhiro
Department of Electrical and Electronic Engineering, Toyohashi University of Technology
-
Kimura Takayuki
Department Of Electrical And Electronic Engineering Faculty Of Engineering Niigata University
-
Kimura Tatsumi
Photonics Research Institute National Institute Of Advanced Industrial Science And Technology
-
Moriyasu Yoshitaka
Department Of Electrical And Electronic Engineering Toyohashi University Of Technology
関連論文
- Low-Noise Fully Differential Amplifiers Using JFET-CMOS Integration Technology for Smart Sensors
- Neo-Transmitter Using Pulse Width Modulation (PWM) Method for Wireless Smart Sensors
- Traumatic mesenteric bleeding managed solely with transcatheter embolization
- Field Electron Emission from Silicon Nanoprotrusions : Surfaces, Interfaces, and Films
- Improvement of Metal-Oxide Semiconductor Interface Characteristics in Complementary Metal-Oxide Semiconductor on Si(111) by Combination of Fluorine Implantation and Long-Time Hydrogen Annealing
- Fabrication of JFET device on Si (111) for sensor interface array circuit
- Signal Conditioning CMOS Circuits Integrated on Si (111) for Image-Recording Sensor of Neural Activity
- Synthesis and Solid-State Polymerization of Triyne and Enediyne Derivatives with Similar π-Conjugated Structures
- Synthesis of Pyridylbutadiyne Derivatives and Improvement of Their Solid-state Polymerizability by Complexation with Alkanoic Acid
- Single-crystal-to-Single-crystal Polymerization of 4, 4'-Butadiynedibenzylammonium Disorbate
- Effect of Polymerization Degree on Building-up Helical Structure of Oligo(L-lactic acid)
- Observation of Optical Near-Field as Photo-Induced Surface Relief Formation : Surfaces, Interfaces, and Films
- Second-Order Hyperpolarizabilities of Aromatic Carboxylates without Visible Absorption
- Determination of the Optical Constants of the Photostimulable BaFCl:Eu^ and KCl:Eu^ Crystals
- Origin of the F-aggregate Centers in BaFX(X=Cl, Br) Single Crystals
- Optical Properties of Photostimulable Near IR Centers in BaFCl Single Crystals Produced by Two-Photon Excitation
- Metastable Domain Structures of Ferromagnetic Microstructures Observed by Soft X-Ray Magnetic Circular Dichroism Microscopy
- Thermal Properties of BaFCl Crystals Simulated by Molecular Dynamics
- High-power diode-pumped zigzag slab lasers and applications
- Analysis of parasitic oscillation and evaluation of amplifer module of zig-zag slab laser system
- Analysis and evaluation of laser-induced damage of zig-zag slab laser amplifier
- Analysis and Evaluation of Zig-Zag Slab Laser Amplifier with Optical Diamond Geometry
- Development of HALNA DPSSL for the inertial fusion energy
- Diode-Pumped Glass Laser (10J x 10Hz) Development
- Quasi-CW 110kW AlGaAs Laser Diode Array Module for Inertial Fusion Energy Laser Driver : Optics and Quantum Electronics
- Design and Performance of a Diode-Pumped Nd:Silica-Phosphate Glass Zig-Zag Slab Laser Amplffier for Inertial Fusion Energy : Optics and Quantum Electronics
- Thermal- and Spectral-Characteristics of High-Power Quasi-Continuous Wave 940-nm InGaAs Diode Laser Arrays
- Bandwidth Narrowing of an All-Solid-State Optical Parametric Oscillator Amplifier System
- Conceptual Design Studies of a Laser Diode Pumped Solid State Laser System for the Laser Fusion Reactor Driver
- A Split-Disk Geometry Glass Laser Amplifier
- Direct Interferometric Measurement of Static and Nonlinear Wavefront Distortions of a High Power Glass Laser Beam
- Development of Radio Frequency Transmitters Including On-chip Antenna for Intelligent Human Sensing Systems
- Electronic Structure of the Si(100) Surface A Defects Analyzed by Scanning Tunneling Spectroscopy at 80 K
- Spontaneous Fluctuation between Symmetric and Buckled Dimer Domains of Si(100) at 80 K
- Prognostic Factors and Proliferative Activities in Breast Cancer. A Comparative Study between Recurrent and Non-Recurrent Cases of Human Breast Carcinomas
- The Green Broad Band Photoluminescence in Sulfur Annealed CuGaS_2 Single Crystals
- NMR Study of ^3He Adsorbed in High-Silica Zeolites and A1PO_4-5 : I. QUANTUM LIQUIDS AND SOLIDS : He in Restricted Geometry
- Spatial Structure of Electronegative Ar/CF_4 Plasmas in Capacitive RF Discharges : Nuclear Science, Plasmas, and Electric Discharges
- Tunnel Junction for Long-Wavelength Vertical-Cavity Surface-Emitting Lasers : Optics and Quantum Electronics
- Spatial Profile Measurements of Charged Particles in Capacitively-Coupled RF (13.56MHz) Oxygen Discharges
- Improvement of Current Injection Uniformity and Device Resistance in Long-Wavelength Vertical-Cavity Surface-Emitting Laser Using a Tunnel Junction
- Gap Length Dependence of Electron Energy Distribution in Low-Pressure Ar Capacitively Coupled RF Discharges
- Long Wavelength GaInAsP/InP Laser with n-n Contacts Using AlAs/InP Hole Injecting Tunnel Junction
- Fabrication of Langmuir-Blodgett Films with a Novel Amphiphilic Ferrate (III) Coordination Compound
- High-Pulse-Energy, High-Average-Power, Ultra-Short-Pulse Laser : "GENBU"-Project and its Status
- Design architecture of the HALNA 100 test module for IEF driver (レーザーエネルギー学研究センター 平成17年度 共同研究成果報告書(平成17年4月-平成18年3月))
- New Potential of a Direct Laser-Diode-Pumped Yb:YAG Laser
- Excess Noise Characteristics of Hydrogenated Amorphous Silicon p-i-n Photodiode Films
- Excess Noise Characteristics of a-Si:H p-i-n Photodiode Films
- Excess Noise Characteristics of Hydrogenated Amorphous Silicon Avalanche Photodiode Films Using Functionally Graded Structure
- Excess Noise Characteristics of a-Si:H Avalanche Photodiode Films Using Functionally Graded Structure
- Highly sensitive quantification of vancomycin in plasma samples using liquid chromatography-tandem mass spectrometry and oral bioavailability in rats
- Realization of n-type and p-type Si-Microprobe Array Using In-Situ Doping with Selective Vapor-Liquid-Solid (VLS) Growth Method
- Highly Syn π-Facial Preference in the Diels - Alder Reactions of 1,2,3,4,5-Pentamethylcyclopentadienes Having Carboxy, Ethoxycarbonyl, and Cyano Substituents at 5-Positions
- Characterization of SOS Films Grown with Amorphous Si Buffer Layers by MOS FET's
- High Resolution Transmission Electron Microscopic Studies on a Superconductor YPd_2B_2C_x Compound
- Structure and Superconducting Properties of Y-Pd-B-C System
- A Study of GaAs Digital ICs on Si Substrates
- Effect of Bias Sputtering on W and W-Al Schottky Contact Formation and its Application to GaAs MESFETs : III-V Compound Semiconductors Devices and Materials(Solid State Devices and Materials 1)
- Heat Capacities of H_2 and D_2 in Some Restricted Geometries : I. QUANTUM LIQUIDS AND SOLIDS : He in Restricted Geometry
- Heat Capacity Anomaly of Molecular Hydrogen Adsorbed in Interlayer Space of N^+(CH_3)_4-Montmorillonite
- Asymmetric Implantation Self-alignment Technique for GaAs MESFETs : Semiconductors and Semiconductors Devices
- Axial Dependence of Electron Energy Distribution in Symmetrically RF Ar Discharges
- Evaluation of Diabetic Nephropathy by Doppler Color Flow Imaging
- A Fused pH and Fluorescence Sensor Using the Same Sensing Area
- Compact Electrochemical System Using On-Chip Sensor Electrodes and Integrated Devices
- Charge Accumulation Type Hydrogen Ion Image Sensor with High pH Resolution
- Properties and Mechanism of Si Selective Epitaxial Growth on Al_2O_3 using Electrom Beam Irradiation
- Deep Levels in Argon-Implanted and Annealed Indium Phosphide
- Low-Temperature Formation of β-Type Silicon Carbide by Jon-Beam Mixing
- Double SOI Structures and Device Applications with Heteroepitaxial Al_2O_3 and Si
- Magnetization Process and Resistance Jumps in a Submicron-Scale Cross-Shaped Wire
- Exchange Interaction from Current and Voltage Probes in Galvanomagnetic Effect in Poly-Crystal Co Thin Film
- Multichannel 5 × 5-Site 3-Dimensional Si Microprobe Electrode Array for Neural Activity Recording System
- Effects of the π and π^* Orbitals of the 5-Unsaturated Substituents on the π-Facial Selectivities in the Diels-Alder Reactions of Cyclopentadienes
- Epitaxial Si on Al_2O_3 Films Grown with O_2 Gas by the Ultrahigh-Vacuum Chemical Vapor Deposition Method
- The Effect of Oxidation Source Gas on Epitaxial Al_2O_3 Films on Si
- Epitaxial Si on Al_2O_3 Films Grown with O_2 Gas by UHV-CVD Method
- Novel Pressure Sensors Using Epitaxially Stacked Si/Al_2O_3/Si Structures for High-Precision Thickness Control of Silicon Diaphragms
- Reductive Degradation of a[2Fe-2S] Cluster of Chlorella Ferredoxin Studied by Circular Dichroism Spectroscopy
- Formation of Very Thin Epitaxial Al_2O_3 Pre-layer with Very Smooth Surface on Si (111) Using a Protective Oxide Layer
- Formation of Very Thin Epitaxial Al_2O_3 Pre-Layer with Very Smooth Surface on Si(111) Using Protective Oxide Layer
- Fabrication of the Si/Al_2O_3/SiO_2/Si Structure Using O_2 Annealed Al_2O_3/Si Structure
- Fabrication of the Si/Al_2O_3/SiO_2/Si Structure by Using the O_2 Annealed Al_2O_3/Si Structure
- Fabrication and Electrical Characterization of Ultrathin Crystalline Al_2O_3 Gate Dielectric Films on Si(100) and Si(111) by Molecular Beam Epitaxy : Electrical Properties of Condensed Matter
- Fabrication of Resonance Tunnel Diode by γ-Al_2O_3/Si Multiple Heterostructures
- Three Dimensional Polysilicon Type Accelerometer Using Poly-Si/SiOX_n/Si/SiOX_n/Si Structure
- High-T_c Superconducting Film on Silicon Substrate with ZrO_2 Buffer Layer : Electrical Properties of Condensed Matter
- C-Axis-Oriented Superconducting Oxide Film by the Sol-Gel Method : Electrical Properties of Condensed Matter
- Superconducting Oxides by the Sol-Gel Method Using Alkoxides : Electrical Properties of Condensed Matter
- Effect of Oxygen Radicals for Epitaxial Growth of Al_2O_3 on Si
- On the genus field of an algebraic number field of odd prime degree
- Study of a Wireless Multimodal Sensing System Integrated with an Electrical Conductivity Sensor and a Temperature Sensor for the Health Control of Cows
- Development of Surface Morphology of Epitaxial Al_2O_3 on Silicon by Controlling Reaction between Oxygen and Silicon Surface
- Difference of Si Selective Growth on Al_2O_3 and SiO_2 Substrates by Electron Beam Irradiation Method
- Fabrication of Si/Al2O3/Si Silicon on Insulator Structures Grown by Ultrahigh-Vacuum CVD Method
- Preparation of PLZT Thin Films by RF Sputtering
- Back-Irradiation Type Photo-Detector Arrays Using Field Emitter Deviece(Recent Progress in Photon Detection Technology)
- Fabrication of Thermoelectric Sensor Using Silicon-on-Insulator Structure
- Synthesis and Solid-State Polymerization of Butadiyne Derivatives with Trialkoxyphenylurethane Groups