Gap Length Dependence of Electron Energy Distribution in Low-Pressure Ar Capacitively Coupled RF Discharges
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 2000-03-15
著者
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Kimura Takashi
Department of Neurology, National Douhoku Hospital
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Kanabe Tadashi
Hamamatsu Photonics K.k.
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Kaga Kazutaka
Department Of Crystalline Materials Science Graduate School Of Engineering Nagoya University
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Tokumaru Katsumi
Photonics Research Institute National Institute Of Advanced Industrial Science And Technology
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OHE Kazuyuki
Department of Systems Engineering, Nagoya Institute of Technology
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Kawashima Toshiyuki
Hamamatsu Photonics K.k.
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Kimura T
Photonics Research Institute National Institute Of Advanced Industrial Science And Technology
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KAGA Kouji
Department of Systems Engineering, Nagoya Institute of Technology
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Kaga Kouji
Department Of Systems Engineering Nagoya Institute Of Technology
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Ohe Kazuyuki
Department Of Systems Engineering Nagoya Institute Of Technology
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Ohe Kazuyuki
Department Of Electrical Engineering Nagoya University
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Kimura T
Institute Of Applied Physics 21th Century Coe Nano Project University Of Tsukuba
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Kaga K
Department Of Systems Engineering Nagoya Institute Of Technology
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Kimura Tatsumi
Photonics Research Institute National Institute Of Advanced Industrial Science And Technology
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Kimura Takashi
Department Of Medicine And Molecular Science Division Of Frontier Medical Science Programs For Biome
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Kimura Takashi
Department Of Comparative Pathology Faculty Of Veterinary Medicine Hokkaido University
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KIMURA Takashi
Department of Cardiovascular, Respiratory and Metabolic Medicine Graduate School of Medicine, Kagoshima University
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