Electron Kinetics in the Hot-Cathode Negative Glow of a Helium Discharge

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 2000-03-15

著者

• Sirghi Lucel

  Faculty Of Physics "al.i.cuza" University

• Sirghi L

  Nagoya Univ. Nagoya Jpn

• POPA Gheorghe

  Faculty of Physics, Alexandru Ioan Cuza University

• OHE Kazuyuki

  Department of Systems Engineering, Nagoya Institute of Technology

• COSTIN Claudiu

  Faculty of Physics, "Al.I.Cuza" University

• Costin Claudiu

  Faculty Of Physics "al.i.cuza" University

• Ohe Kazuyuki

  Department Of Systems Engineering Nagoya Institute Of Technology

• Ohe Kazuyuki

  Department Of Electrical Engineering Nagoya University

• Popa Gheorghe

  Faculty Of Physics "al.i.cuza" University

関連論文

• Pulsed Regime of a Hollow-Cathode Discharge Used in a Sputter Source
• Optical Emission Spectroscopy Diagnostic of Discharge Plasma in a Hollow-Cathode Sputtering Source
• Electron Kinetics in the Hot-Cathode Negative Glow of a Helium Discharge
• Electron Kinetics of Ionization Waves in Helium Positive Columns
• Spatial Structure of Electronegative Ar/CF_4 Plasmas in Capacitive RF Discharges : Nuclear Science, Plasmas, and Electric Discharges
• Spatial Profile Measurements of Charged Particles in Capacitively-Coupled RF (13.56MHz) Oxygen Discharges
• Gap Length Dependence of Electron Energy Distribution in Low-Pressure Ar Capacitively Coupled RF Discharges
• Detection of Electron Energy Distribution Function by Finite Impulse Response Filter
• Axial Dependence of Electron Energy Distribution in Symmetrically RF Ar Discharges
• Electron Energy Distribution Detection in Symmetrically Driven RF Argon Discharge
• Piezoresistance Effect of Graphite-Papostor
• Dispersion of Ionization Waves in Positive Columns
• Electron Energy Distribution Function in Fluctuating Plasmas
• Eigen Vector and Phase Difference of Wave Component of Ionization Wave
• A New Resistor Having An Anomalously Large Positive Temperature Coefficient
• Self-Modulation of Nonlinear Ionization Wave Packets Excited in He Glow Discharges
• Experimental Investigations on Ne/CF_4 Inductively Coupled Discharges
• Electron Energy Distribution Function in Neon-Nitrogen Mixture Positive Column
• Effects of Nitrogen and Oxygen Radicals on Low-Temperature Bio-Molecule Processing
• Electron Energy Distribution of Ar - O_2 Capacitively-Coupled RF (13.56MHz) Discharge
• Frequency Spectrum and Dispersion Relation of Moving Striations in Narrow Discharge Tubes
• Formation of Dip Structure of Electron Energy Distribution Function in Diffused Nitrogen Plasmas
• Optical Emission Spectroscopy Diagnostic of Discharge Plasma in a Hollow-Cathode Sputtering Source
• Pressure Dependences of Electron Energy Distribution and Power Dissipation in Symmetrical RF Discharges of Inert Gases
• Forward Ionization Waves Externally Excited in Hydrogen Positive Columns of Glow Discharges
• Identification of Two Modes of Ionization Waves Excited in HE Positive Columns
• Spatial Profile Measurements of Charged Particles in Capacitively-Coupled RF (13.56 MHz) Oxygen Discharges

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