Electron Energy Distribution Detection in Symmetrically Driven RF Argon Discharge
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概要
- 論文の詳細を見る
The electron energy distribution function (EEDF) is measured with a Langmuir probe in a symmetrically driven capacitively coupled rf argon discharge. The distortion of the probe current-voltage characteristics by rf plasma potential fluctuation, which is suppressed by electric circuit resonance among an inductance, the electrode-plasma sheath and the plasma-ground stray capacitances, is finally eliminated by applying the remaining fluctuation to the probe. The detected EEDF differs from the theoretical one obtained from the Boltzmann equation.
- 社団法人応用物理学会の論文
- 1993-08-15
著者
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Kimura Takashi
Department of Neurology, National Douhoku Hospital
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OHE Kazuyuki
Department of Systems Engineering, Nagoya Institute of Technology
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Ohe Kazuyuki
Department Of Systems Engineering Nagoya Institute Of Technology
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Ohe Kazuyuki
Department Of Electrical Engineering Nagoya University
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Kimura Takashi
Department Of Comparative Pathology Faculty Of Veterinary Medicine Hokkaido University
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KIMURA Takashi
Department of Cardiovascular, Respiratory and Metabolic Medicine Graduate School of Medicine, Kagoshima University
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