Formation of Dip Structure of Electron Energy Distribution Function in Diffused Nitrogen Plasmas
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概要
- 論文の詳細を見る
Sr>atial det>endence of the electron ener:v distribtrtion ['trnctiora (EBDF) in loxv-presstrre difl'trsednitrogen plastnas pr'odtrced by DC discharge is ntae;tsured Icy 21 Langrautrir probe. The BBDFrtaeastrred at pressures below 10 Il'lTOI'I has a dijc structtrre at about 3 eV dtne to vibrationzrlexcitation collisions dturing electr'on dif['usion toxvar'cls the wall. The depth of' tlae dijc dependson botla the distance f'rouaa the plasraaa sotrrce and the pressture. The sittaplified one-dinaensionalmodel, in which the spattial v?triation in the electron difl'trsion fltrx is balanced to the reunove andintroduction of electrons dtre to inelatstic collisioras, C2[Il predict the spatial dejcendertces of tlaeBEDF.
- 社団法人日本物理学会の論文
- 1998-10-15
著者
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Ohe Kazuyuki
Department Of Electrical Engineering Nagoya University
-
Kimura Takashi
Department Of Medicine And Molecular Science Division Of Frontier Medical Science Programs For Biome
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Nakamura Masatoshi
Department Of Advanced Systems Control Engineering Saga University
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Nakamura M
Iwate Univ. Morioka
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Nakamura Masatoshi
Department Of Advanced Systems Control Engineering Graduate School Of Science And Engineering Saga U
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Kimura Takashi
Department Of Comparative Pathology Faculty Of Veterinary Medicine Hokkaido University
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