Spatial Profile Measurements of Charged Particles in Capacitively-Coupled RF (13.56 MHz) Oxygen Discharges
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概要
- 論文の詳細を見る
The spatial profiles of negatively charged particles were measured in a capacitively-coupled RF oxygen discharge over the pressure range from 0.1 Torr to 0.5 Torr using a Langmuir probe. The measured profile of negative ions was approximated as a parabolic function, while that of the electrons was uniform for the entire discharge except in the sheath. The measured profiles of negative ions and electronegativity were compared with the simplified theoretical model.
- INSTITUTE OF PURE AND APPLIED PHYSICSの論文
- 2001-01-15
著者
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Kaga Kouji
Department Of Systems Engineering Nagoya Institute Of Technology
-
Ohe Kazuyuki
Department Of Electrical Engineering Nagoya University
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KIMURA Takashi
Department of Cardiovascular, Respiratory and Metabolic Medicine Graduate School of Medicine, Kagoshima University
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Kaga Kouji
Department of Systems Engineering, Nagoya Institute of Technology, Gokiso-cho, Showa-ku, Nagoya 466-8555, Japan
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