Pressure Dependences of Electron Energy Distribution and Power Dissipation in Symmetrical RF Discharges of Inert Gases
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概要
- 論文の詳細を見る
The plasma parameters, including the electron energy distribution function (EEDF), are measured with a Langmuir probe in symmetrically capacitively coupled RF (13.56 MHz) discharges of Ne, Ar and Xe over a range of gas pressures from 0.1 to 0.8 Torr, while keeping the RF current constant at 150 mA. The EEDFs are Druyvesteyn-like for these discharges. The average electron energy decreases with the gas pressure and the electron density increases. In bulk plasmas of respective gases, joule heating is more dominant than stochastic heating and heating due to ton acceleration, except for low-pressure Ne discharges.
- 社団法人応用物理学会の論文
- 1997-03-15
著者
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Ohe Kazuyuki
Department Of Electrical Engineering Nagoya University
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Kimura Takashi
Department Of Medicine And Molecular Science Division Of Frontier Medical Science Programs For Biome
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Kimura Takashi
Department Of Comparative Pathology Faculty Of Veterinary Medicine Hokkaido University
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KIMURA Takashi
Department of Cardiovascular, Respiratory and Metabolic Medicine Graduate School of Medicine, Kagoshima University
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