Electron Energy Distribution of Ar - O_2 Capacitively-Coupled RF (13.56MHz) Discharge
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概要
- 論文の詳細を見る
- 1997-12-15
著者
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OHE Kazuyuki
Department of Systems Engineering, Nagoya Institute of Technology
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KAGA Kouji
Department of Systems Engineering, Nagoya Institute of Technology
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Kaga Kouji
Department Of Systems Engineering Nagoya Institute Of Technology
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Ohe Kazuyuki
Department Of Systems Engineering Nagoya Institute Of Technology
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Ohe Kazuyuki
Department Of Electrical Engineering Nagoya University
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- Electron Kinetics of Ionization Waves in Helium Positive Columns
- Spatial Structure of Electronegative Ar/CF_4 Plasmas in Capacitive RF Discharges : Nuclear Science, Plasmas, and Electric Discharges
- Spatial Profile Measurements of Charged Particles in Capacitively-Coupled RF (13.56MHz) Oxygen Discharges
- Gap Length Dependence of Electron Energy Distribution in Low-Pressure Ar Capacitively Coupled RF Discharges
- Detection of Electron Energy Distribution Function by Finite Impulse Response Filter
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- Electron Energy Distribution Detection in Symmetrically Driven RF Argon Discharge
- Piezoresistance Effect of Graphite-Papostor
- Dispersion of Ionization Waves in Positive Columns
- Electron Energy Distribution Function in Fluctuating Plasmas
- Eigen Vector and Phase Difference of Wave Component of Ionization Wave
- A New Resistor Having An Anomalously Large Positive Temperature Coefficient
- Self-Modulation of Nonlinear Ionization Wave Packets Excited in He Glow Discharges
- Experimental Investigations on Ne/CF_4 Inductively Coupled Discharges
- Electron Energy Distribution Function in Neon-Nitrogen Mixture Positive Column
- Electron Energy Distribution of Ar - O_2 Capacitively-Coupled RF (13.56MHz) Discharge
- Frequency Spectrum and Dispersion Relation of Moving Striations in Narrow Discharge Tubes
- Formation of Dip Structure of Electron Energy Distribution Function in Diffused Nitrogen Plasmas
- Pressure Dependences of Electron Energy Distribution and Power Dissipation in Symmetrical RF Discharges of Inert Gases
- Forward Ionization Waves Externally Excited in Hydrogen Positive Columns of Glow Discharges
- Identification of Two Modes of Ionization Waves Excited in HE Positive Columns
- Spatial Profile Measurements of Charged Particles in Capacitively-Coupled RF (13.56 MHz) Oxygen Discharges