Asymmetric Implantation Self-alignment Technique for GaAs MESFETs : Semiconductors and Semiconductors Devices
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1988-07-20
著者
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Akiyama M
Kyushu National Industrial Research Institute Agency Of Industrial Science And Technology Ministry O
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Akiyama Masahiro
Semiconductor Technology Laboratory Oki Electric Industry Co. Ltd.
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Kimura T
Photonics Research Institute National Institute Of Advanced Industrial Science And Technology
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Sakuta M
Department Of Biology Ochanomizu University
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INOKUCHI Kazuyuki
Electronic Components Group, Oki Electric Industry Co., Ltd.,
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KIMURA Tamotsu
R & D Group, Oki Electric Incustry Co.,Ltd
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INOKUCHI Kazuyuki
R & D Group, Oki Electric Incustry Co.,Ltd
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SAKUTA Masaaki
R & D Group, Oki Electric Incustry Co.,Ltd
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Inokuchi K
Electronic Components Group Oki Electric Industry Co. Ltd.
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AKIYAMA Masahiro
R & D Group, Oki Electric Industry Co.Ltd.,
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