Characterization of Oxygen and Carbon in Undoped AlGaAs Grown by Organometallic Vapor-Phase Epitaxy
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概要
- 論文の詳細を見る
- Publication Office, Japanese Journal of Applied Physics, Faculty of Science, University of Tokyoの論文
- 1997-01-01
著者
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Akiyama M
Kyushu National Industrial Research Institute Agency Of Industrial Science And Technology Ministry O
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Akiyama Masahiro
Semiconductor Technology Laboratory Oki Electric Industry Co. Ltd.
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Kakinuma Hiroaki
The Devices Technology Laboratory Oki Electric Industry Co. Ltd.
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Kakinuma Hiroaki
Research Laboratory Oki Electric Industry Co. Ltd.
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Kakinuma Hiroaki
Semiconducter Technology Laboratory Oki Electric Industry Co. Ltd.
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MOHRI Mikio
Semiconductor Technology Laboratory, Oki Electric Industry Co., Ltd.
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Mohri M
Semiconductor Technology Laboratory Oki Electric Industry Co. Ltd.
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Mohri Mikio
Semiconductor Technology Laboratory Oki Electric Industry Co. Ltd.
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