Low-Loss Optical Interposer with Recessed Vertical-Cavity Surface-Emitting Laser Diode and Photodiode Chips into Si Substrate
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概要
- 論文の詳細を見る
A new interposer with an optical interconnection called optical interposer has been proposed for a high-performance parallel processor system. The optical interposer is composed of polynorbornene (PNB) optical waveguides with 45° micromirrors and a Si substrate having chip-sized through-Si holes of 150 μm depth. The polymeric waveguides are formed on the Si substrate before forming the through-Si holes by deep reactive ion etching (DRIE). Vertical-cavity surface-emitting laser diode (VCSEL) and photodiode (PD) chips are placed onto the photolithographically defined hole patterns that are 15 μm larger than the size of the chips. In addition, the chips can be precisely aligned and recessed into the holes by passive alignment of self-assembly driven by the surface tension of a lead-free solder. We can fabricate the low-loss optical interposer with an insertion loss of below 0.2 dB measured at the waveguide length of 5 cm and a coupling loss of 0.5 dB measured with a 45° micromirror.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2008-04-25
著者
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Fukushima Takafumi
Department Of Advanced Materials Chemistry Graduate School Of Engineering Yokohama National Universi
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Tanaka Tetsu
Department Of Quantum Materials Science University Of Tokushima
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Koyanagi Mitsumasa
Department Of Bioengineering And Robotics Graduate School Of Engineering Tohoku University
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Fujiwara Makoto
Sumitomo Bakelite Co., Ltd., 495 Akiba-cho, Totsuka-ku, Yokohama 245-0052, Japan
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Mori Tetsuya
Sumitomo Bakelite Co., Ltd., Utsunomiya 321-3231, Japan
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Choki Koji
Sumitomo Bakelite Co., Ltd., 495 Akiba-cho, Totsuka-ku, Yokohama 245-0052, Japan
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Terada Shinsuke
Sumitomo Bakelite Co., Ltd., 495 Akiba-cho, Totsuka-ku, Yokohama 245-0052, Japan
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Shirato Yoji
Sumitomo Bakelite Co., Ltd., 495 Akiba-cho, Totsuka-ku, Yokohama 245-0052, Japan
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Owari Hiroshi
Sumitomo Bakelite Co., Ltd., 495 Akiba-cho, Totsuka-ku, Yokohama 245-0052, Japan
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Watanabe Kei
Sumitomo Bakelite Co., Ltd., 495 Akiba-cho, Totsuka-ku, Yokohama 245-0052, Japan
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Matsuyama Mutsuhiro
Sumitomo Bakelite Co., Ltd., 495 Akiba-cho, Totsuka-ku, Yokohama 245-0052, Japan
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Takahama Keizo
Sumitomo Bakelite Co., Ltd., 495 Akiba-cho, Totsuka-ku, Yokohama 245-0052, Japan
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Miyao Kenji
Sumitomo Bakelite Co., Ltd., 495 Akiba-cho, Totsuka-ku, Yokohama 245-0052, Japan
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Mori Tetsuya
Sumitomo Bakelite Co., Ltd., 495 Akiba-cho, Totsuka-ku, Yokohama 245-0052, Japan
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Tanaka Tetsu
Department of Bioengineering and Robotics, Graduate School of Engineering, Tohoku University, 6-6-01 Aza-Aoba, Aramaki, Aoba-ku, Sendai 980-8579, Japan
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