Development of Si Neural Probe with Microfluidic Channel Fabricated Using Wafer Direct Bonding
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概要
- 論文の詳細を見る
This paper reports the development of a novel Si neural probe with a microfluidic channel to deliver drugs into neural tissue. We fabricated this Si neural probe using wafer direct bonding. To confirm the fluidic capability of the fabricated Si probe, we demonstrated the ejection of liquid from the microfluidic channel using a syringe pump. We confirmed that the Si probe had sufficient bonding strength to eject liquid. In addition, we investigated the pressure drops in the microfluidic channel. From the results, we observed a linear relationship between the flow rate and the pressure drop. Since this result agreed well with the calculated values, we confirmed that the microfluidic channel was successfully formed by wafer direct bonding.
- 2009-04-25
著者
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Katayama Norihiro
Department Of Applied Information Science Graduate School Of Information Sciences Tohoku University
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Sakamoto Kazuhiro
Research Institute Of Electrical Communication Tohoku University
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Fukushima Takafumi
Department Of Advanced Materials Chemistry Graduate School Of Engineering Yokohama National Universi
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Tanaka Tetsu
Department Of Quantum Materials Science University Of Tokushima
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KOBAYASHI Risato
Department of Bioengineering and Robotics, Graduate School of Engineering, Tohoku University
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Koyanagi Mitsumasa
Department Of Bioengineering And Robotics Graduate School Of Engineering Tohoku University
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Mushiake Hajime
Department Of Physiology Graduate School Of Medicine Tohoku University
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Kanno Soichiro
Department of Biomedical Engineering, Graduate School of Biomedical Engineering, Tohoku University, 6-6-01 Aza-Aoba, Aramaki, Aoba-ku, Sendai 980-8579, Japan
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Sanghoon Lee
Department of Biomedical Engineering, Graduate School of Biomedical Engineering, Tohoku University, 6-6-01 Aza-Aoba, Aramaki, Aoba-ku, Sendai 980-8579, Japan
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Jicheol Bea
Department of Bioengineering and Robotics, Graduate School of Engineering, Tohoku University, 6-6-01 Aza-Aoba, Aramaki, Aoba-ku, Sendai 980-8579, Japan
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Tanaka Tetsu
Department of Bioengineering and Robotics, Graduate School of Engineering, Tohoku University, 6-6-01 Aza-Aoba, Aramaki, Aoba-ku, Sendai 980-8579, Japan
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Katayama Norihiro
Department of Applied Information Science, Graduate School of Information Sciences, Tohoku University, 6-3-09 Aza-Aoba, Aramaki, Aoba-ku, Sendai 980-8579, Japan
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