Micromirror with Two Parallel Rotation Axes for External Cavity Diode Laser(Micro/Nano Photonic Devices,<Special Section>Microoptomechatronics)

概要

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A micromirror for an external cavity diode laser is described. The mirror is supported by two sets of parallel torsion bars enabling piston motion as well as rotation. These motions are for realizing continuous wavelength tuning. Adjusting two rotations electrically, the pivot of the mirror rotation can be controlled. The long stroke of the vertical comb is realized by the deep three-dimensional structure prepared by the wafer bending method.
社団法人電子情報通信学会の論文
2007-01-01