1-05-02 パラレル配置した圧電バイモルフの共振を利用した触覚インターフェースの開発(バルク波デバイス)

概要

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We developed an ultrasonic vibrator for a tactile interface using ultrasonic resonance of piezoelectric bimorphs arranged in parallel. The vibrator is required for a compact in order to attach it to a pointing device. This vibrator has mechanism that amplifies vibration amplitude using resonance of piezoelectric bimorphs, which are combined in a cross shape. The vibrator consists of eight piezoelectric elements, a shim, jigs and a contactor of an elastic metal. Tactile stimulation is generated by amplitude modulations of an ultrasonic vibration. In order to make large generative force and vibration amplitude, the ultrasonic vibrator was designed by finite element analysis. We confirmed analytically that the vibrator could generate a vibration amplitude of more than tens of micro meters.
超音波エレクトロニクスの基礎と応用に関するシンポジウム運営委員会の論文
2007-11-14