305 サーフェスモータステージシステム用コントローラの研究([2]計測システムと応用技術)(OS10 加工計測・評価)

概要

論文の詳細を見る
Three degree-of-freedom (D.O.F.) planar motion stages for precision positioning have a problem that the motion in one-direction will interfere with those in other directions as a disturbance because of the free stage structure. A conventional PID controller does not have the function of compensateing for the disturbance of interference. A disturbance observer is thus employed in the PID controller so that the planar motion stage system becomes more.robustness to the interference disturbance. A feed forward function is also adopted in the controller for improvement of the tracking capability. The detail of the controller design is decribed in the paper. Experiments are also carried out for confirming the feasibility of the developed controller.
一般社団法人日本機械学会の論文
2004-11-19