光干渉型サーフェスエンコーダに関する研究

概要

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A surface encoder, which is composed of a 2D angle grid and a 2D slope sensor, is analyzed in wave optics. Based on the wave optics model, behavior of optical diffraction pattern on the photo-detector caused by 5-degree-of-freedom motions of the angle grid, which are the X-(Y-) movement, tilt motion about the X-(Y-) axis and rotation about the Z-axis, are investigated. The diffraction pattern on the photo-detector show different behavior in each of the motions. In addition, a new 5 degree-of-freedom measurement method is proposed based on the analysis results. This method uses a multi-cell photodiode instead of the QPD in the slope sensor. The principle of the new surface encoder and the design of the multi-cell photodiode are described. Simulation results based on the wave optics model are also presented.
公益社団法人精密工学会の論文
2005-08-05