SPMの高精度化手法の提案とその液中作動型AFMへの適用

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This paper presents an accurate AFM used in liquid that is free from the Z-directional disrortion of the servo actuator. Two correcting methods are employed in this AFM. One is the external- monitoring method, and the other is the in situ self-calibration method. The external-monitoring method is based on the fact that PZT actuators from the same class show similar hysteresis patterns. The same voltage signal used to control the servo actuator is applied to another PZT actuator which is called as the reference actuator. The displacement of the reference actuator is measured by a displacement sensor. As a result, the distortion of the AFM image can be corrected satisfactorily. In the in situ self-calibration method, the derivative of the calibration curve function of the PZT actuator is calculated from the profile measurement data sets which are obtained by repetition of measurement after small Z-directional shift. Input displacement at every sampling point is approxi- mately estimated first by using a straight calibration line. The derivative is integrated with referring the approximate input to get the approximate calibration curve. Then the approximation of input value of every sampling point is improved with the obtained calibration curve. Next the integral of derivative is improved with the newly estimated input values. Repeating these improving process the calibration curve converges to the correct one, and the distortion of the AFM image can be corrected. Principles and experimental results of the two methods are presented.
一般社団法人日本機械学会の論文
1998-06-25

SPMの高精度化手法の提案とその液中作動型AFMへの適用

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