形状測定機能をもつナノ加工プローブの研究 : 加工プローブにおける加工評価実験(G13-2 機械加工および工作機械(2),G13 生産加工・工作機械部門)

概要

論文の詳細を見る
This paper presents a nanomachining instrument with nanometrology function for precision nanofabrication of large areamicro-structured surfaces. A single crystal diamond tool for diamond turning is mounted on one end of a hollow-typepiezoelectric (PZT) ring actuator. The other end of the PZT is attached to a compact piezoelectric force sensor. The diamondtool is actuated by the PZT for nanomachining of micro-structures over a large area surface through employing thefast-tool-servo technique. The same instrument can also be used for nanometrology of the machined surface through utilizingthe force sensor output. To measure the surface profile, the diamond tool is scanned along the surface and the contact force isdetected by the force sensor. During the scanning, the diamond tool is servo controlled by the PZT so that the tool tip is keptcontact with the surface with a constant contact force based on the force sensor output. The displacement of the PZT, whichcorresponds to the profile height of the machined surface, can thus be obtained from the capacitance sensor inside the PZT.
一般社団法人日本機械学会の論文
2004-09-04