マイクロ切削工具切れ刃形状の三次元測定装置に関する研究 : ―測定装置の構築と切れ刃形状測定実験―

概要

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This paper describes an instrument for 3D edge profile measurement of diamond micro-cutting tools used for ultra-precision fabrication of micro-structures. The measurement targets of this instrument are round-nose tools with nose radii of less than 100 μm. The core elements of the instrument are an atomic force microscope (AFM) for profile measurement of the tool edge and an optical sensor for alignment of the AFM cantilever tip with the tool edge. A three-axis closed-loop controlled PZT scanner is employed in the AFM for high-accuracy profile measurement and DC-servo-motor-driven stages are employed in the alignment mechanism for automatic alignment. Measurement experiments of micro-tools with nose radii of 30 μm and 8 μm are carried out, respectively. Cutting edge radii, nose local radii and edge contour roundness are evaluated based on the 3D edge profile measurement data.
公益社団法人精密工学会の論文