高速工具サーボによる大面積正弦波微細格子基準面の高精度創成 : 格子基準面ローカル領域の高精度化(機械要素,潤滑,工作,生産管理など)

概要

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This paper describes a diamond turning fabrication system for a sinusoidal grid surface, which is a superposition of periodic sinusoidal waves along the X-and Y-directions. The wavelength and amplitude of the sinusoidal wave in each direction are 100μm and 100 nm, respectively. The fabrication system, based on fast-tool-servo (FTS), has the ability to generate the angle grid surface over an area of φ150 mm. This paper focuses on the improvement of the fabrication accuracy in local areas. Each of these areas is approximately 1 mm ×1 mm, which can be imaged by an interference microscope. Specific fabrication errors, caused by the round nose geometry of the diamond cutting tool and the data digitization, for the manufacturing process are successfully identified by Discrete Fourier Transform of the microscope images. Compensation processes are carried out to achieve a reduction of the errors. As a result, the fabrication errors in local areas of the angle grid surface are reduced to 1/10.
一般社団法人日本機械学会の論文
2005-12-25