SPMにおける形状歪の高精度補正の研究

概要

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Almost all scanning probe microscopes (SPM), such as STM and AFM, use piezoelectric elements (PZT) as scanning and servo actuators. These elements have, however, some undesirable properties such as hysteresis, creep and nonlinear performance, which cause 3-dimensional distortion in SPM topography. In the present paper, two new methods are proposed to correct such image distortion of an STM. The first one uses calibration data of PZT actuators to correct the obtained STM image, which is called as 'software method'. The second one is to measure indirectly the displacement of the PZT actuator. The displacement of the STM probe is proportionally magnified through mechanical and electrical means and transferred to a reference point on a cantilever. This magnified displacement is measured by an accurately corrected sensor. This is called 'the external monitoring method'. Both methods were very effective for correcting the image distortion of STM.
1996-09-25