追従式光触針法に関する研究 : ゼロ位法の効果

概要

論文の詳細を見る
Roughness sensors by optical stylus have merits of non-contact measurement, relatively long working distance, high resolution and high accuracy. But they have also some weak points. They are too small range of measurement and imperfect compensation for inclination of measured curve. In order to improve these weak points, it is tried to use null methods by manually and automatically holding focal point on the measured surface. It has been certified that the inclination of surface can be compensated better by the null method than by the usual method. In the present paper, it has been shown that the inclination of surface more than 20 degree can be compensated by the null method and shape of bearing ball of φ 14 mm has been able to be measured in the range of 300 μm depth. A trial construction of roughness sensor by using an objective with actuator of moving coil which are designed for a pick-up of laser disc player. This trial sensor can show the possibility of it to large dynamic range and wide application field.
公益社団法人精密工学会の論文
1991-08-05