ミリスケールSTMの開発

概要

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In measuring the roughness of machined surfaces by STM, it is necessary that the STM have a large scanning area. In this report, a newly developed STM system which meets this requirement is described. It consists mainly of an X-Y stepping motor stage and three tunneling tips in a line, each of which is driven by a piezoactuator. The tip positioned at the midpoint is used as a measuring probe; the right and the left ones are used as smoothing probes which are not sensitive to surface roughness. The STM is designed to cancel the relative shift in the z-direction due to thermal drift and/or vibration between the measuring tip and the specimen by using two smoothing tips. The basic characteristics of the STM system are investigated and measurements with millimeter-scale scanning are tried. The STM makes it possible to perform a large-scale scanning without reducing the resolution apparently. A new system combining an optical sensor with the STM is also constructed. Using the system, the results of the STM and those of the optical sensor can be compared closely.
一般社団法人日本機械学会の論文
1992-02-25