角度センサの高精度自立的校正法の研究

概要

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A new calibration method which needs no accurate reference instrument is proposed to calibrate precision angle sensors. In the first step of the method, the mean sensitivity of an angle sensor is determined by applying the self-calibration principle of a rotary scale. For this calibration, a special system has been constructed with two coaxial rotary tables driven by stepping motors individually. In the next step, the linearity error of a pair angle sensors are determined by applying the self-calibration principle which has been developed for the displacement sensors. Using this method, the linearity error of the calibration curve can be determined within an uncertainty limit, which is given by the resolution of the angle sensors, electric noise and thermal drift of the system. Angle sensors using critical angle prism have been developed which have measuring range 1296 s (arc) and resolution of 0.05 s (are). These angle sensors have been calibrated by the proposed method. It was found that the repeatability error of the calibrated mean sensitivity was less then 0.02%, and the repeatability error of the calibrated linearity error was about 0.1 s (arc).
公益社団法人精密工学会の論文
1994-11-05