変位計の線形誤差の自律的校正

概要

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A new method to calibrate precision meters for metrology is proposed. In the method two meters including sensors and amplifiers are used to compare their outputs with each other and any accurate meter for the reference of calibration is not necessary. The calibration system is constructed by two meters A and B to be calibrated, a kind of lever to give displacement and precision stages positioning the sensors axially. Calibrating with this system, the linearity error of calibration line is determined within an uncertainty limit, which is given by resolution power of the sensors, electric noise and thermal disturbance of circumstance. As a trial experiments, capacitance type displacement meters (micro sense) have been calibrated. The output of the meters with 50 μm range is determined within an uncertainty of about 10 nm. The proposed self-calibration method can determine the most certain calibration curve which can be able to be obtained in the circumstance of the experiment.
社団法人精密工学会の論文
1993-12-05