複数の測定子を用いた真直度測定法における測定子較正誤差の不ぞろいの影響

概要

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This paper presents measurement errors that are caused by difference of gain between sensors in the case of measuring straightness using multipe sensors, e. g. , the 2-point method. In the case of the 2-point method and differential laser autocollimation, if there is a difference of gain between sensors, inclination of a measured surface causes quadratic error in the measurement results. And in the case of the 3-point method, it causes cubic error. This indicates means that accuracy of measurement depends on deviation from parallelism between the measured surface and the guide of sensors. Assuming that the spatial period of the measured surface is 30 or 50 times as long as the sampling interval, the difference of gain between sensors of the 2-point method or differential laser autocollimation must be within 1 or 2% to yield a gain error of measurement results within l0%. On the other hand, the difference between sensors of the 3-point method must be within 0.1 or 0.2%.
一般社団法人日本機械学会の論文
1994-09-25