3点法による真円度形状測定と軸の回転精度測定に関する一考察

概要

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In the field of the roundness measurement, the 3-point method is used as the typical software datum to achieve high accuracy beyond the radial motion error of the axis. Furthermore, the 3-point method is applied to the radial motion measurement using compensation procedure. Many papers have reported the characteristics of the 3-point method for the roundness measurement. On the other hand, the characteristics of the 3-point method for the radial motion measurement is not clear. This article proposes a novel 3-point method for the radial motion measurement based on the weighted addition and inverse filtering. The transfer function of the 3-point method for the radial motion measurement is the same that the roundness measurement. Influence of the random error of the 3-point method is low. Influence by the setting angle error of the displacement sensors is large at high spatial frequency domain.
公益社団法人精密工学会の論文
1999-09-05