零点補正型差動レーザオートコリメーションに関する研究

概要

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This paper presents a new differential laser auto-collimation method that can remove the influence of zero point difference. Suface profile measurement methods that detect the second differential of a surface, such as the 3-point method and differential laser autocollimation (DLAC), are effected by the zero point difference of the sensors. We have developed a zero point compensation metbod for DLAC with a simple mechanism that required only the rotation of one polarized beam splitter. Two DLAC systems with zero point compensation were made. Measurement range and accuracy of the first system as an inclination of a measured suface were 30' and ±5" in the worst case, respectively. Those ofthe second system were 10' and ±3". The comparison bctween the measurement results obtained by the proposed method and those obtained by another method that used sampled data of one beam and the pitching data of an auto-collimator showed the usefulness of this zero point compensation.
公益社団法人精密工学会の論文
2001-03-05