光触針におけるスポットの平滑特性について

概要

論文の詳細を見る
An optical roughness sensor employing the critical angule method has two displacement sensitive ranges which are called the precision range and the wide range. In the present paper ; the smoothing characteristics of a large ortical spot were investgated using four kinds of objectives with different specifications. The large spot can smooth periodic curves such as a grating and a machined surface which has both periodic and random components. The smoothing effects in the experimental results were less than the theoretical ones obtained by averaging the profiles over the spot area. The large spot in the wide range can therefore be used as displacement sensor to measure straightness error in scanning motion, to make a datum line for in-process profile measurements and to make an optical skid in the optical roughness sensor.
一般社団法人日本機械学会の論文
1991-11-25