超精密角度センサの開発 : 光源部の温度ドリフトの補正

概要

論文の詳細を見る
It is important and effective to use angle information in profile measurement of ultra-precision surfaces. Very high sensitivity becomes necessary for angle displacement detection because of the high accuracy demand for this profile measurement. For this reason, development of high precision angle sensor is strongly needed. It has been reported that the noble performance of a newly developed angle sensor based on the principle of critical angle reflection. In order to improve the sensor stability and to approach 1/100 second accuracy, in this report, it has been added that a kind of compensator of thermal drift of the light source. The angle sensor consists of a semiconductor laser as the light source, an angle detector with two critical angle prisms, a compensator with two critical angle prisms and four photo-diodes. Two angle sensors of this kind with measuring range of 1800 s (arc) are developed, and are calibrated by the self-calibration method. It was found that the repeatability error of the mean sensitivity was improved to 0.01 %, and the linearity error was improved to 0.025 s (arc), moreover the error due to the thermal drift of the directional angle of the light source was reduced to be about 1/3 of original one.
公益社団法人精密工学会の論文
1995-11-05