3軸角度センサに関する研究 : 測定原理の提案と検証実験

概要

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This paper describes a 3-axes angle sensor based on laser autocollimation for simultaneous measurement of small tilt angles about X, Y and Z-axes. The sensor consists of a laser diode as the light source and quadrant photodiodes (QPDs) as the optical position-sensing device. Differing from a conventional 2-axis autocollimator, the sensor uses a diffractive grating as the target mirror. It is verified that the sensitivity of the sensor in the θ_x (rolling) direction is determined by the pitch of the diffractive grating and the diameter of the laser beam. The sensitivities in the θ_y (pitching) and the θ_z (yawing) direction are determined by the wavelength and the beam diameter of the laser beam. It is confirmed that the resolution of θ_x is about 0.2 arc-seconds, and those of θ_y and θ_z are about 0.02 arc-seconds. Optical design and experimental results are presented.
公益社団法人精密工学会の論文
2008-09-05