S1303-1-2 超精密旋盤の運動誤差測定に関する研究 : スライド運動誤差測定のための回転型反転法の提案(加工計測・評価システム(1))

概要

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Ultra-precision diamond turning machine has the slide motion error which consists of the straightness error and the parallelism error. However, measurement of the parallelism error between the slide axis and the spindle axis of a diamond turning machine is difficult by the conventional reversal method. In order to measure not only the straightness error but also parallelism error, the rotating reversal method is proposed. Two capacitive sensors are employed to scan the cylinder workpiece which was installed on the spindle. The evaluate straightness error of the Z-slide of the ultra-precision diamond turning machine was to be about 100 nm and parallelism error was measured to be approximately 1 arc-second of the Z-slide by the rotating reversal method over a measurement range of 126 mm
2009-09-12